FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3010776687> ?p ?o ?g. }

• W3010776687 endingPage "729" @default.
• W3010776687 startingPage "723" @default.
• W3010776687 abstract "As integrated circuit (IC) industry advances to the nanometer scale, layout pattern plays more and more important role on chip fabrication. Layout-dependent effect (LDE) studies how different patterns influence the fabrication results. Chemical–mechanical polishing (CMP), one of the most important processes during IC fabrication, is strongly influenced by LDE. The purpose of this article is to show a convolutional neural network (CNN)-based method to model post-CMP surface topography problem. The method accurately predicts the topological height of the chip surface after CMP by using CNN to abstract features from layout patterns, aiming to analyze defects that may cause failure. This article first addresses about the principles and practicability of using the CNN method to build a CMP model, then builds up a complete CNN structure, and compares the CNN-based model with a traditional pressure-distribution-based CMP model. We designed test chips containing different structures and fabricated them with 28- and 45-nm process nodes. Surface topography is measured using atomic force profiler (AFP) and scanning electron microscope (SEM). The result shows that the total root-mean-squared error (RMSE) of the CNN-based model is 22.41 A, whereas the RMSE of the pressure-distribution-based model is 65.54 A. The CNN-based CMP model shows better accuracy." @default.
• W3010776687 created "2020-03-23" @default.
• W3010776687 creator A5000159988 @default.
• W3010776687 creator A5071314631 @default.
• W3010776687 date "2020-04-01" @default.
• W3010776687 modified "2023-10-16" @default.
• W3010776687 title "A CNN-Based CMP Planarization Model Considering LDE Effect" @default.
• W3010776687 cites W1484136265 @default.
• W3010776687 cites W1601215252 @default.
• W3010776687 cites W1972207333 @default.
• W3010776687 cites W2015861736 @default.
• W3010776687 cites W2058438180 @default.
• W3010776687 cites W2069858738 @default.
• W3010776687 cites W2075194566 @default.
• W3010776687 cites W2097117768 @default.
• W3010776687 cites W2127767984 @default.
• W3010776687 cites W2147800946 @default.
• W3010776687 cites W2147950901 @default.
• W3010776687 cites W2158215530 @default.
• W3010776687 cites W2379918805 @default.
• W3010776687 cites W2546302380 @default.
• W3010776687 doi "https://doi.org/10.1109/tcpmt.2020.2979472" @default.
• W3010776687 hasPublicationYear "2020" @default.
• W3010776687 type Work @default.
• W3010776687 sameAs 3010776687 @default.
• W3010776687 citedByCount "8" @default.
• W3010776687 countsByYear W30107766872020 @default.
• W3010776687 countsByYear W30107766872021 @default.
• W3010776687 countsByYear W30107766872022 @default.
• W3010776687 countsByYear W30107766872023 @default.
• W3010776687 crossrefType "journal-article" @default.
• W3010776687 hasAuthorship W3010776687A5000159988 @default.
• W3010776687 hasAuthorship W3010776687A5071314631 @default.
• W3010776687 hasConcept C105795698 @default.
• W3010776687 hasConcept C111919701 @default.
• W3010776687 hasConcept C11413529 @default.
• W3010776687 hasConcept C136525101 @default.
• W3010776687 hasConcept C138113353 @default.
• W3010776687 hasConcept C139945424 @default.
• W3010776687 hasConcept C142724271 @default.
• W3010776687 hasConcept C153180895 @default.
• W3010776687 hasConcept C154945302 @default.
• W3010776687 hasConcept C159985019 @default.
• W3010776687 hasConcept C165005293 @default.
• W3010776687 hasConcept C180088628 @default.
• W3010776687 hasConcept C192562407 @default.
• W3010776687 hasConcept C204787440 @default.
• W3010776687 hasConcept C2524010 @default.
• W3010776687 hasConcept C26771246 @default.
• W3010776687 hasConcept C2776799497 @default.
• W3010776687 hasConcept C33923547 @default.
• W3010776687 hasConcept C41008148 @default.
• W3010776687 hasConcept C49040817 @default.
• W3010776687 hasConcept C530198007 @default.
• W3010776687 hasConcept C71924100 @default.
• W3010776687 hasConcept C76155785 @default.
• W3010776687 hasConcept C81363708 @default.
• W3010776687 hasConcept C98045186 @default.
• W3010776687 hasConceptScore W3010776687C105795698 @default.
• W3010776687 hasConceptScore W3010776687C111919701 @default.
• W3010776687 hasConceptScore W3010776687C11413529 @default.
• W3010776687 hasConceptScore W3010776687C136525101 @default.
• W3010776687 hasConceptScore W3010776687C138113353 @default.
• W3010776687 hasConceptScore W3010776687C139945424 @default.
• W3010776687 hasConceptScore W3010776687C142724271 @default.
• W3010776687 hasConceptScore W3010776687C153180895 @default.
• W3010776687 hasConceptScore W3010776687C154945302 @default.
• W3010776687 hasConceptScore W3010776687C159985019 @default.
• W3010776687 hasConceptScore W3010776687C165005293 @default.
• W3010776687 hasConceptScore W3010776687C180088628 @default.
• W3010776687 hasConceptScore W3010776687C192562407 @default.
• W3010776687 hasConceptScore W3010776687C204787440 @default.
• W3010776687 hasConceptScore W3010776687C2524010 @default.
• W3010776687 hasConceptScore W3010776687C26771246 @default.
• W3010776687 hasConceptScore W3010776687C2776799497 @default.
• W3010776687 hasConceptScore W3010776687C33923547 @default.
• W3010776687 hasConceptScore W3010776687C41008148 @default.
• W3010776687 hasConceptScore W3010776687C49040817 @default.
• W3010776687 hasConceptScore W3010776687C530198007 @default.
• W3010776687 hasConceptScore W3010776687C71924100 @default.
• W3010776687 hasConceptScore W3010776687C76155785 @default.
• W3010776687 hasConceptScore W3010776687C81363708 @default.
• W3010776687 hasConceptScore W3010776687C98045186 @default.
• W3010776687 hasIssue "4" @default.
• W3010776687 hasLocation W30107766871 @default.
• W3010776687 hasOpenAccess W3010776687 @default.
• W3010776687 hasPrimaryLocation W30107766871 @default.
• W3010776687 hasRelatedWork W1599501004 @default.
• W3010776687 hasRelatedWork W1988803218 @default.
• W3010776687 hasRelatedWork W2077343310 @default.
• W3010776687 hasRelatedWork W2081290327 @default.
• W3010776687 hasRelatedWork W2111947267 @default.
• W3010776687 hasRelatedWork W2767651786 @default.
• W3010776687 hasRelatedWork W2912288872 @default.
• W3010776687 hasRelatedWork W3010776687 @default.
• W3010776687 hasRelatedWork W3011280489 @default.
• W3010776687 hasRelatedWork W564581980 @default.
• W3010776687 hasVolume "10" @default.

• next