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• W3011036797 endingPage "7009" @default.
• W3011036797 startingPage "7001" @default.
• W3011036797 abstract "In this study, a Thin-film Piezoelectric-on-Silicon (TPoS) MEMS oscillator is successfully demonstrated that uses lead zirconate titanate (PZT) thin-film piezoelectric layer deposited on a single-crystal silicon substrate to realize a length-extensional mode resonator, having a resonant frequency of 5.12 MHz and a quality factor (Q) of 311. For closed-loop implementation, a commercial Lock-in amplifier with a Phase Locked Loop (PLL) facility was used to fulfill the Barkhausen criteria for oscillation. The mass resolution and sensitivity of the proposed mass sensor are 0.54 pg and 4.96 Hz/pg, respectively. Finally, a board-level sustaining circuit, which includes a transimpedance amplifier (TIA) and an attenuator is integrated with the TPoS MEMS resonator for oscillation to achieve a portable sensor. Phase noise of -104.11 dBc/Hz at 1 kHz offset was recorded under ambient pressure and room temperature for a carrier frequency of 5.12 MHz. The mass resolution for the board-level mass sensor implemented in this work is 0.15 pg." @default.
• W3011036797 created "2020-03-23" @default.
• W3011036797 creator A5009730846 @default.
• W3011036797 creator A5016673454 @default.
• W3011036797 creator A5089136999 @default.
• W3011036797 date "2020-07-01" @default.
• W3011036797 modified "2023-09-23" @default.
• W3011036797 title "A Thin-Film Piezoelectric-on-Silicon MEMS Oscillator for Mass Sensing Applications" @default.
• W3011036797 cites W1999834382 @default.
• W3011036797 cites W2018409502 @default.
• W3011036797 cites W2018806435 @default.
• W3011036797 cites W2019352084 @default.
• W3011036797 cites W2021092963 @default.
• W3011036797 cites W2031096873 @default.
• W3011036797 cites W2031123097 @default.
• W3011036797 cites W2054014643 @default.
• W3011036797 cites W2084775831 @default.
• W3011036797 cites W2097912213 @default.
• W3011036797 cites W2101543208 @default.
• W3011036797 cites W2104193311 @default.
• W3011036797 cites W2106321461 @default.
• W3011036797 cites W2111110240 @default.
• W3011036797 cites W2121310366 @default.
• W3011036797 cites W2127533763 @default.
• W3011036797 cites W2141726299 @default.
• W3011036797 cites W2148935287 @default.
• W3011036797 cites W2149152856 @default.
• W3011036797 cites W2152038393 @default.
• W3011036797 cites W2155141507 @default.
• W3011036797 cites W2157659843 @default.
• W3011036797 cites W2285605407 @default.
• W3011036797 cites W2290639642 @default.
• W3011036797 cites W2292321083 @default.
• W3011036797 cites W2590133109 @default.
• W3011036797 cites W2620952441 @default.
• W3011036797 cites W2779252230 @default.
• W3011036797 cites W2791881845 @default.
• W3011036797 cites W2798109388 @default.
• W3011036797 cites W2884099926 @default.
• W3011036797 cites W2912716258 @default.
• W3011036797 cites W2981158360 @default.
• W3011036797 cites W3000165467 @default.
• W3011036797 doi "https://doi.org/10.1109/jsen.2020.2979283" @default.
• W3011036797 hasPublicationYear "2020" @default.
• W3011036797 type Work @default.
• W3011036797 sameAs 3011036797 @default.
• W3011036797 citedByCount "24" @default.
• W3011036797 countsByYear W30110367972020 @default.
• W3011036797 countsByYear W30110367972021 @default.
• W3011036797 countsByYear W30110367972022 @default.
• W3011036797 countsByYear W30110367972023 @default.
• W3011036797 crossrefType "journal-article" @default.
• W3011036797 hasAuthorship W3011036797A5009730846 @default.
• W3011036797 hasAuthorship W3011036797A5016673454 @default.
• W3011036797 hasAuthorship W3011036797A5089136999 @default.
• W3011036797 hasConcept C119599485 @default.
• W3011036797 hasConcept C127413603 @default.
• W3011036797 hasConcept C133386390 @default.
• W3011036797 hasConcept C145366948 @default.
• W3011036797 hasConcept C192562407 @default.
• W3011036797 hasConcept C193523891 @default.
• W3011036797 hasConcept C194257627 @default.
• W3011036797 hasConcept C24326235 @default.
• W3011036797 hasConcept C2781128178 @default.
• W3011036797 hasConcept C37977207 @default.
• W3011036797 hasConcept C46362747 @default.
• W3011036797 hasConcept C49040817 @default.
• W3011036797 hasConcept C544956773 @default.
• W3011036797 hasConcept C79090758 @default.
• W3011036797 hasConcept C89631360 @default.
• W3011036797 hasConcept C92631468 @default.
• W3011036797 hasConcept C97126364 @default.
• W3011036797 hasConceptScore W3011036797C119599485 @default.
• W3011036797 hasConceptScore W3011036797C127413603 @default.
• W3011036797 hasConceptScore W3011036797C133386390 @default.
• W3011036797 hasConceptScore W3011036797C145366948 @default.
• W3011036797 hasConceptScore W3011036797C192562407 @default.
• W3011036797 hasConceptScore W3011036797C193523891 @default.
• W3011036797 hasConceptScore W3011036797C194257627 @default.
• W3011036797 hasConceptScore W3011036797C24326235 @default.
• W3011036797 hasConceptScore W3011036797C2781128178 @default.
• W3011036797 hasConceptScore W3011036797C37977207 @default.
• W3011036797 hasConceptScore W3011036797C46362747 @default.
• W3011036797 hasConceptScore W3011036797C49040817 @default.
• W3011036797 hasConceptScore W3011036797C544956773 @default.
• W3011036797 hasConceptScore W3011036797C79090758 @default.
• W3011036797 hasConceptScore W3011036797C89631360 @default.
• W3011036797 hasConceptScore W3011036797C92631468 @default.
• W3011036797 hasConceptScore W3011036797C97126364 @default.
• W3011036797 hasFunder F4320322108 @default.
• W3011036797 hasIssue "13" @default.
• W3011036797 hasLocation W30110367971 @default.
• W3011036797 hasOpenAccess W3011036797 @default.
• W3011036797 hasPrimaryLocation W30110367971 @default.
• W3011036797 hasRelatedWork W1505412396 @default.
• W3011036797 hasRelatedWork W2022578513 @default.
• W3011036797 hasRelatedWork W2088071999 @default.
• W3011036797 hasRelatedWork W2097968934 @default.

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