Matches in SemOpenAlex for { <https://semopenalex.org/work/W3011689055> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W3011689055 endingPage "3498" @default.
- W3011689055 startingPage "3498" @default.
- W3011689055 abstract "Semiconductor manufacturers continue to increase the component densities on computer chips by reducing the device dimensions to less than 10 nm. This trend requires faster, more precise, and more robust optical metrology tools that contain complex and high-precision optics with challenging imaging requirements. Here, we present dark-field digital holographic microscopy as a promising optical metrology technique that uses optics with acceptable complexity. A theoretical analysis and an experimental demonstration of this technique are presented, showing the impact of the coherence length of the light source on the field of view. Finally, we also present the first holographically obtained images of metrology targets." @default.
- W3011689055 created "2020-03-23" @default.
- W3011689055 creator A5008738414 @default.
- W3011689055 creator A5013241549 @default.
- W3011689055 creator A5034510484 @default.
- W3011689055 creator A5046110011 @default.
- W3011689055 creator A5040203709 @default.
- W3011689055 date "2020-04-09" @default.
- W3011689055 modified "2023-09-24" @default.
- W3011689055 title "Impact of coherence length on the field of view in dark-field holographic microscopy for semiconductor metrology: theoretical and experimental comparisons" @default.
- W3011689055 cites W1968224219 @default.
- W3011689055 cites W1979517961 @default.
- W3011689055 cites W2008062057 @default.
- W3011689055 cites W2043890590 @default.
- W3011689055 cites W2044182772 @default.
- W3011689055 cites W2063966852 @default.
- W3011689055 cites W2068733065 @default.
- W3011689055 cites W2074502458 @default.
- W3011689055 cites W2081612260 @default.
- W3011689055 cites W2084796681 @default.
- W3011689055 cites W2090591884 @default.
- W3011689055 cites W2091815072 @default.
- W3011689055 cites W2105622061 @default.
- W3011689055 cites W2120400380 @default.
- W3011689055 cites W2121306184 @default.
- W3011689055 cites W2125012610 @default.
- W3011689055 cites W2132386412 @default.
- W3011689055 cites W2157795824 @default.
- W3011689055 cites W2163370365 @default.
- W3011689055 cites W2279895124 @default.
- W3011689055 cites W2293941472 @default.
- W3011689055 cites W2897607471 @default.
- W3011689055 cites W2969403788 @default.
- W3011689055 cites W2303226672 @default.
- W3011689055 doi "https://doi.org/10.1364/ao.379236" @default.
- W3011689055 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/32400465" @default.
- W3011689055 hasPublicationYear "2020" @default.
- W3011689055 type Work @default.
- W3011689055 sameAs 3011689055 @default.
- W3011689055 citedByCount "3" @default.
- W3011689055 countsByYear W30116890552020 @default.
- W3011689055 countsByYear W30116890552021 @default.
- W3011689055 countsByYear W30116890552022 @default.
- W3011689055 crossrefType "journal-article" @default.
- W3011689055 hasAuthorship W3011689055A5008738414 @default.
- W3011689055 hasAuthorship W3011689055A5013241549 @default.
- W3011689055 hasAuthorship W3011689055A5034510484 @default.
- W3011689055 hasAuthorship W3011689055A5040203709 @default.
- W3011689055 hasAuthorship W3011689055A5046110011 @default.
- W3011689055 hasConcept C120665830 @default.
- W3011689055 hasConcept C121332964 @default.
- W3011689055 hasConcept C147080431 @default.
- W3011689055 hasConcept C187590223 @default.
- W3011689055 hasConcept C195766429 @default.
- W3011689055 hasConcept C202444582 @default.
- W3011689055 hasConcept C2781181686 @default.
- W3011689055 hasConcept C33923547 @default.
- W3011689055 hasConcept C59994255 @default.
- W3011689055 hasConcept C62520636 @default.
- W3011689055 hasConcept C9652623 @default.
- W3011689055 hasConceptScore W3011689055C120665830 @default.
- W3011689055 hasConceptScore W3011689055C121332964 @default.
- W3011689055 hasConceptScore W3011689055C147080431 @default.
- W3011689055 hasConceptScore W3011689055C187590223 @default.
- W3011689055 hasConceptScore W3011689055C195766429 @default.
- W3011689055 hasConceptScore W3011689055C202444582 @default.
- W3011689055 hasConceptScore W3011689055C2781181686 @default.
- W3011689055 hasConceptScore W3011689055C33923547 @default.
- W3011689055 hasConceptScore W3011689055C59994255 @default.
- W3011689055 hasConceptScore W3011689055C62520636 @default.
- W3011689055 hasConceptScore W3011689055C9652623 @default.
- W3011689055 hasFunder F4320321014 @default.
- W3011689055 hasFunder F4320323783 @default.
- W3011689055 hasIssue "11" @default.
- W3011689055 hasLocation W30116890551 @default.
- W3011689055 hasLocation W30116890552 @default.
- W3011689055 hasOpenAccess W3011689055 @default.
- W3011689055 hasPrimaryLocation W30116890551 @default.
- W3011689055 hasRelatedWork W1983336347 @default.
- W3011689055 hasRelatedWork W2021722499 @default.
- W3011689055 hasRelatedWork W2095175040 @default.
- W3011689055 hasRelatedWork W2143324018 @default.
- W3011689055 hasRelatedWork W2158599340 @default.
- W3011689055 hasRelatedWork W3011689055 @default.
- W3011689055 hasRelatedWork W3018657153 @default.
- W3011689055 hasRelatedWork W3173960790 @default.
- W3011689055 hasRelatedWork W41769205 @default.
- W3011689055 hasRelatedWork W4286877187 @default.
- W3011689055 hasVolume "59" @default.
- W3011689055 isParatext "false" @default.
- W3011689055 isRetracted "false" @default.
- W3011689055 magId "3011689055" @default.
- W3011689055 workType "article" @default.