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• W3012107012 abstract "In the 14nm FinFET(Fin-shaped Field-Effect Transistor) node, SADP(Self-Aligned Double Patterning) technology has been introduced to produce Fin because of the exposure limit of 193nm DUV immersion lithography. As is known to all, pitch walking issue appears when the technology comes to SADP, so how to accurately measure pitch walking is particularly important. In this paper, we use CD-SEM(Critical Dimension Scanning Electron Microscope) to measure the CD(Critical Dimension) of Fin pitch inline, and evaluate different parameter settings or machine type to improve the accuracy of the measurement results. For sub-nanometer accuracy of line width measurement, TEM(Transmission Electron Microscope) image is used to calibrate the line width measurements as a kind of reference metrology." @default.
• W3012107012 created "2020-03-23" @default.
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• W3012107012 date "2020-03-20" @default.
• W3012107012 modified "2023-10-16" @default.
• W3012107012 title "The improvement of measurement accuracy of SADP pitch walking issue" @default.
• W3012107012 doi "https://doi.org/10.1117/12.2552057" @default.
• W3012107012 hasPublicationYear "2020" @default.
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