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• W3013308984 abstract "Multiple patterning ArF immersion lithography has been expected as the promising technology to meet tighter leading edge device requirements. To enhance the resolution and productivity for multiple-patterning application, key light source performances are spectral bandwidth stability and wavelength stability. The increased spectral bandwidth stability contributes to more precise critical dimension (CD) control and improves device yield. The increased wavelength stability can realize accurate focus and improve overlay accuracy. Our new spectral bandwidth control module improves E95 spectral bandwidth stability. The spectral bandwidth has deviations by thermal history with light source operations. It should be always controlled tightly even after a quiescent interval, such as wafer loading. In our laser system, a spectral bandwidth is controlled by adjusting the wavefront of a laser beam using a two-lens optical system within a resonator. A high speed actuator equipped the movable lens enables E95 spectral bandwidth stability to be less variation. New designs of drive mechanism suppress the lens vibration and spectral bandwidth error. This technology enables 3-sigma of E95 spectral bandwidth field average to be under 5 fm. This large shrinkage for E95 spectral bandwidth stability is the key to improve larger focus budgets for a leading edge processes. A new designed line narrowing module (LNM) improves wavelength stability. The wavelength is controlled by changing the rotation of a beam expander prism using actuator. Wavelength stability is improved further by the anti-vibration structure of the actuated prism in the LNM. The new design prism holding mechanisms reduce the mass of actuator load. This increases the stiffness of the system and suppresses the vibration of the prism rotation. New LNM reduce wavelength stability about 20%. The improvement in wavelength stability contributes to accurate focus and overlay. In addition, the lifetime of LNM is extending to reduce the Cost of Operation (CoO) and the light source downtime. A new ArF excimer laser, GT66A, maximizes device yield, process productivity and minimizes the operational costs for chipmakers." @default.
• W3013308984 created "2020-04-03" @default.
• W3013308984 creator A5000535326 @default.
• W3013308984 creator A5003596492 @default.
• W3013308984 creator A5008786241 @default.
• W3013308984 creator A5012704350 @default.
• W3013308984 creator A5012817481 @default.
• W3013308984 creator A5020839989 @default.
• W3013308984 creator A5022423372 @default.
• W3013308984 creator A5037307500 @default.
• W3013308984 creator A5058359692 @default.
• W3013308984 creator A5066945435 @default.
• W3013308984 creator A5085691349 @default.
• W3013308984 creator A5089651544 @default.
• W3013308984 date "2020-03-23" @default.
• W3013308984 modified "2023-09-25" @default.
• W3013308984 title "Imaging performance enhancement by improvements of spectral performance stability and controllability on the cutting-edge." @default.
• W3013308984 doi "https://doi.org/10.1117/12.2551845" @default.
• W3013308984 hasPublicationYear "2020" @default.
• W3013308984 type Work @default.
• W3013308984 sameAs 3013308984 @default.
• W3013308984 citedByCount "2" @default.
• W3013308984 countsByYear W30133089842021 @default.
• W3013308984 crossrefType "proceedings-article" @default.
• W3013308984 hasAuthorship W3013308984A5000535326 @default.
• W3013308984 hasAuthorship W3013308984A5003596492 @default.
• W3013308984 hasAuthorship W3013308984A5008786241 @default.
• W3013308984 hasAuthorship W3013308984A5012704350 @default.
• W3013308984 hasAuthorship W3013308984A5012817481 @default.
• W3013308984 hasAuthorship W3013308984A5020839989 @default.
• W3013308984 hasAuthorship W3013308984A5022423372 @default.
• W3013308984 hasAuthorship W3013308984A5037307500 @default.
• W3013308984 hasAuthorship W3013308984A5058359692 @default.
• W3013308984 hasAuthorship W3013308984A5066945435 @default.
• W3013308984 hasAuthorship W3013308984A5085691349 @default.
• W3013308984 hasAuthorship W3013308984A5089651544 @default.
• W3013308984 hasConcept C120665830 @default.
• W3013308984 hasConcept C121332964 @default.
• W3013308984 hasConcept C127413603 @default.
• W3013308984 hasConcept C15336307 @default.
• W3013308984 hasConcept C154945302 @default.
• W3013308984 hasConcept C165699331 @default.
• W3013308984 hasConcept C172707124 @default.
• W3013308984 hasConcept C192562407 @default.
• W3013308984 hasConcept C24326235 @default.
• W3013308984 hasConcept C2776257435 @default.
• W3013308984 hasConcept C41008148 @default.
• W3013308984 hasConcept C69710193 @default.
• W3013308984 hasConcept C76155785 @default.
• W3013308984 hasConceptScore W3013308984C120665830 @default.
• W3013308984 hasConceptScore W3013308984C121332964 @default.
• W3013308984 hasConceptScore W3013308984C127413603 @default.
• W3013308984 hasConceptScore W3013308984C15336307 @default.
• W3013308984 hasConceptScore W3013308984C154945302 @default.
• W3013308984 hasConceptScore W3013308984C165699331 @default.
• W3013308984 hasConceptScore W3013308984C172707124 @default.
• W3013308984 hasConceptScore W3013308984C192562407 @default.
• W3013308984 hasConceptScore W3013308984C24326235 @default.
• W3013308984 hasConceptScore W3013308984C2776257435 @default.
• W3013308984 hasConceptScore W3013308984C41008148 @default.
• W3013308984 hasConceptScore W3013308984C69710193 @default.
• W3013308984 hasConceptScore W3013308984C76155785 @default.
• W3013308984 hasLocation W30133089841 @default.
• W3013308984 hasOpenAccess W3013308984 @default.
• W3013308984 hasPrimaryLocation W30133089841 @default.
• W3013308984 hasRelatedWork W1980641539 @default.
• W3013308984 hasRelatedWork W1991646189 @default.
• W3013308984 hasRelatedWork W2000597037 @default.
• W3013308984 hasRelatedWork W2032039204 @default.
• W3013308984 hasRelatedWork W2059330617 @default.
• W3013308984 hasRelatedWork W2298425537 @default.
• W3013308984 hasRelatedWork W2513182638 @default.
• W3013308984 hasRelatedWork W2897138569 @default.
• W3013308984 hasRelatedWork W3092860501 @default.
• W3013308984 hasRelatedWork W3113128114 @default.
• W3013308984 isParatext "false" @default.
• W3013308984 isRetracted "false" @default.
• W3013308984 magId "3013308984" @default.
• W3013308984 workType "article" @default.