Matches in SemOpenAlex for { <https://semopenalex.org/work/W3014183485> ?p ?o ?g. }
- W3014183485 endingPage "335" @default.
- W3014183485 startingPage "327" @default.
- W3014183485 abstract "Amorphous-nanocrystalline (a-nc) boron carbide thin films were prepared by chemical vapor deposition (CVD) by using ortho-carborane as a single-source precursor for inertial confinement fusion (ICF) application. The effects of deposition temperature (Tdep) and total pressure (Ptot) on chemical composition, microstructure, stoichiometry and morphology of the boron carbide films were investigated. The TEM results show that the structure of the film is mainly composed of amorphous boron carbide with dispersive nano-grains, which will be able to improve the mechanical properties of the film with relatively low roughness. The hardness of the (a-nc) boron carbide film obtained in this study reached 20.6 GPa, and roughness of 3.21 nm. The deposited films sized 0.2–1.9 μm in thickness with B/C atomic ratio ranged from 0.14 to 3.29. The deposition rate decreased with increasing deposition temperature and Ptot, while B/C ratio increased." @default.
- W3014183485 created "2020-04-10" @default.
- W3014183485 creator A5012045802 @default.
- W3014183485 creator A5016067287 @default.
- W3014183485 creator A5016362569 @default.
- W3014183485 creator A5027835055 @default.
- W3014183485 creator A5030683638 @default.
- W3014183485 creator A5037629364 @default.
- W3014183485 creator A5056136417 @default.
- W3014183485 creator A5071557981 @default.
- W3014183485 creator A5079369801 @default.
- W3014183485 creator A5091626025 @default.
- W3014183485 date "2020-04-02" @default.
- W3014183485 modified "2023-09-30" @default.
- W3014183485 title "Fabrication of (a-nc) boron carbide thin films via chemical vapor deposition using ortho-carborane" @default.
- W3014183485 cites W1971396365 @default.
- W3014183485 cites W1971720136 @default.
- W3014183485 cites W1973697445 @default.
- W3014183485 cites W1979345919 @default.
- W3014183485 cites W1986119155 @default.
- W3014183485 cites W1988133629 @default.
- W3014183485 cites W2015345245 @default.
- W3014183485 cites W2017252283 @default.
- W3014183485 cites W2025943065 @default.
- W3014183485 cites W2033355670 @default.
- W3014183485 cites W2034550371 @default.
- W3014183485 cites W2035829665 @default.
- W3014183485 cites W2043459672 @default.
- W3014183485 cites W2065520458 @default.
- W3014183485 cites W2073703876 @default.
- W3014183485 cites W2077860177 @default.
- W3014183485 cites W2096744366 @default.
- W3014183485 cites W2118953527 @default.
- W3014183485 cites W2164981547 @default.
- W3014183485 cites W2236983087 @default.
- W3014183485 cites W2462456690 @default.
- W3014183485 cites W2592987326 @default.
- W3014183485 cites W2604578567 @default.
- W3014183485 cites W4231840211 @default.
- W3014183485 doi "https://doi.org/10.1080/21870764.2020.1743415" @default.
- W3014183485 hasPublicationYear "2020" @default.
- W3014183485 type Work @default.
- W3014183485 sameAs 3014183485 @default.
- W3014183485 citedByCount "4" @default.
- W3014183485 countsByYear W30141834852021 @default.
- W3014183485 countsByYear W30141834852022 @default.
- W3014183485 countsByYear W30141834852023 @default.
- W3014183485 crossrefType "journal-article" @default.
- W3014183485 hasAuthorship W3014183485A5012045802 @default.
- W3014183485 hasAuthorship W3014183485A5016067287 @default.
- W3014183485 hasAuthorship W3014183485A5016362569 @default.
- W3014183485 hasAuthorship W3014183485A5027835055 @default.
- W3014183485 hasAuthorship W3014183485A5030683638 @default.
- W3014183485 hasAuthorship W3014183485A5037629364 @default.
- W3014183485 hasAuthorship W3014183485A5056136417 @default.
- W3014183485 hasAuthorship W3014183485A5071557981 @default.
- W3014183485 hasAuthorship W3014183485A5079369801 @default.
- W3014183485 hasAuthorship W3014183485A5091626025 @default.
- W3014183485 hasBestOaLocation W30141834851 @default.
- W3014183485 hasConcept C113196181 @default.
- W3014183485 hasConcept C127413603 @default.
- W3014183485 hasConcept C140676511 @default.
- W3014183485 hasConcept C144082473 @default.
- W3014183485 hasConcept C151730666 @default.
- W3014183485 hasConcept C171250308 @default.
- W3014183485 hasConcept C178790620 @default.
- W3014183485 hasConcept C185592680 @default.
- W3014183485 hasConcept C19067145 @default.
- W3014183485 hasConcept C191897082 @default.
- W3014183485 hasConcept C192562407 @default.
- W3014183485 hasConcept C2778794521 @default.
- W3014183485 hasConcept C2816523 @default.
- W3014183485 hasConcept C42360764 @default.
- W3014183485 hasConcept C501308230 @default.
- W3014183485 hasConcept C5335593 @default.
- W3014183485 hasConcept C56052488 @default.
- W3014183485 hasConcept C57410435 @default.
- W3014183485 hasConcept C64297162 @default.
- W3014183485 hasConcept C8010536 @default.
- W3014183485 hasConcept C86803240 @default.
- W3014183485 hasConcept C87976508 @default.
- W3014183485 hasConceptScore W3014183485C113196181 @default.
- W3014183485 hasConceptScore W3014183485C127413603 @default.
- W3014183485 hasConceptScore W3014183485C140676511 @default.
- W3014183485 hasConceptScore W3014183485C144082473 @default.
- W3014183485 hasConceptScore W3014183485C151730666 @default.
- W3014183485 hasConceptScore W3014183485C171250308 @default.
- W3014183485 hasConceptScore W3014183485C178790620 @default.
- W3014183485 hasConceptScore W3014183485C185592680 @default.
- W3014183485 hasConceptScore W3014183485C19067145 @default.
- W3014183485 hasConceptScore W3014183485C191897082 @default.
- W3014183485 hasConceptScore W3014183485C192562407 @default.
- W3014183485 hasConceptScore W3014183485C2778794521 @default.
- W3014183485 hasConceptScore W3014183485C2816523 @default.
- W3014183485 hasConceptScore W3014183485C42360764 @default.
- W3014183485 hasConceptScore W3014183485C501308230 @default.
- W3014183485 hasConceptScore W3014183485C5335593 @default.
- W3014183485 hasConceptScore W3014183485C56052488 @default.