Matches in SemOpenAlex for { <https://semopenalex.org/work/W3014277021> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W3014277021 abstract "The acquisition of surface information such as height, roughness and waviness is crucial in production accompanying metrology. This work aims to demonstrate an alternative approach to gather surface roughness information of profiles with millimeter lengths while having sub-nm resolution based on a low-coherence interferometer. The surface height information is encoded by spectral dispersion with a well-defined phase minimum of the interference data. By applying an imaging approach, the captured information on the surface profiles allows an assessment without any scanning along one lateral dimension. The axial resolution is dependent but not limited by the dispersive element. The combination of the determination of the phase minimum and fitting of spectral interference data allows for sub-nm resolution while the axial measurement range is several ten micrometers. This results in a significantly higher aspect ratio than comparable approaches. During this work, initial experiments were performed on a calibrated surface roughness standard from the German national metrology institute PTB. It could be shown that a roughness of Ra = (21.15 ± 0.8) nm and Rq = (26.58 ± 1.0) nm was measurable on a lateral measurement range of 1.5 mm. Due to the application of advanced analysis methods, such as auto-convolution function analysis it was proven that these values correspond well to the values measured for calibration on a tactile profilometer. Additionally, investigations on a polished glass substrate with an aluminum mirror coating are presented. With these measurements roughness differences of Ra = 0.1 nm could be determined within one measurement between different parts of the sample. All data acquisition was carried out in a one-shot fashion." @default.
- W3014277021 created "2020-04-10" @default.
- W3014277021 creator A5045879263 @default.
- W3014277021 creator A5047614656 @default.
- W3014277021 creator A5047912199 @default.
- W3014277021 creator A5051179162 @default.
- W3014277021 creator A5053502150 @default.
- W3014277021 date "2020-04-01" @default.
- W3014277021 modified "2023-09-25" @default.
- W3014277021 title "One-shot roughness measurements based on dispersion-encoded low coherence interferometry" @default.
- W3014277021 doi "https://doi.org/10.1117/12.2555807" @default.
- W3014277021 hasPublicationYear "2020" @default.
- W3014277021 type Work @default.
- W3014277021 sameAs 3014277021 @default.
- W3014277021 citedByCount "0" @default.
- W3014277021 crossrefType "proceedings-article" @default.
- W3014277021 hasAuthorship W3014277021A5045879263 @default.
- W3014277021 hasAuthorship W3014277021A5047614656 @default.
- W3014277021 hasAuthorship W3014277021A5047912199 @default.
- W3014277021 hasAuthorship W3014277021A5051179162 @default.
- W3014277021 hasAuthorship W3014277021A5053502150 @default.
- W3014277021 hasConcept C107365816 @default.
- W3014277021 hasConcept C120665830 @default.
- W3014277021 hasConcept C121332964 @default.
- W3014277021 hasConcept C127162648 @default.
- W3014277021 hasConcept C159985019 @default.
- W3014277021 hasConcept C164086593 @default.
- W3014277021 hasConcept C165838908 @default.
- W3014277021 hasConcept C166689943 @default.
- W3014277021 hasConcept C192562407 @default.
- W3014277021 hasConcept C195766429 @default.
- W3014277021 hasConcept C24890656 @default.
- W3014277021 hasConcept C2777625669 @default.
- W3014277021 hasConcept C2777701225 @default.
- W3014277021 hasConcept C31258907 @default.
- W3014277021 hasConcept C32022120 @default.
- W3014277021 hasConcept C41008148 @default.
- W3014277021 hasConcept C62520636 @default.
- W3014277021 hasConcept C71039073 @default.
- W3014277021 hasConcept C79261456 @default.
- W3014277021 hasConceptScore W3014277021C107365816 @default.
- W3014277021 hasConceptScore W3014277021C120665830 @default.
- W3014277021 hasConceptScore W3014277021C121332964 @default.
- W3014277021 hasConceptScore W3014277021C127162648 @default.
- W3014277021 hasConceptScore W3014277021C159985019 @default.
- W3014277021 hasConceptScore W3014277021C164086593 @default.
- W3014277021 hasConceptScore W3014277021C165838908 @default.
- W3014277021 hasConceptScore W3014277021C166689943 @default.
- W3014277021 hasConceptScore W3014277021C192562407 @default.
- W3014277021 hasConceptScore W3014277021C195766429 @default.
- W3014277021 hasConceptScore W3014277021C24890656 @default.
- W3014277021 hasConceptScore W3014277021C2777625669 @default.
- W3014277021 hasConceptScore W3014277021C2777701225 @default.
- W3014277021 hasConceptScore W3014277021C31258907 @default.
- W3014277021 hasConceptScore W3014277021C32022120 @default.
- W3014277021 hasConceptScore W3014277021C41008148 @default.
- W3014277021 hasConceptScore W3014277021C62520636 @default.
- W3014277021 hasConceptScore W3014277021C71039073 @default.
- W3014277021 hasConceptScore W3014277021C79261456 @default.
- W3014277021 hasLocation W30142770211 @default.
- W3014277021 hasOpenAccess W3014277021 @default.
- W3014277021 hasPrimaryLocation W30142770211 @default.
- W3014277021 hasRelatedWork W13114209 @default.
- W3014277021 hasRelatedWork W21560092 @default.
- W3014277021 hasRelatedWork W21566590 @default.
- W3014277021 hasRelatedWork W31808364 @default.
- W3014277021 hasRelatedWork W31960399 @default.
- W3014277021 hasRelatedWork W32088337 @default.
- W3014277021 hasRelatedWork W34133610 @default.
- W3014277021 hasRelatedWork W38437129 @default.
- W3014277021 hasRelatedWork W5940302 @default.
- W3014277021 hasRelatedWork W16425012 @default.
- W3014277021 isParatext "false" @default.
- W3014277021 isRetracted "false" @default.
- W3014277021 magId "3014277021" @default.
- W3014277021 workType "article" @default.