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- W3014354503 abstract "Abstract The chemical, physical, and electrical properties of the atomic layer deposited Hf 0.5 Zr 0.5 O 2 thin films using tetrakis(ethylmethylamino) (TEMA) and tetrakis(dimethylamino) (TDMA) precursors are compared. The ligand of the metal-organic precursors strongly affects the residual C concentration, grain size, and the resulting ferroelectric properties. Depositing Hf 0.5 Zr 0.5 O 2 films with the TDMA precursors results in lower C concentration and slightly larger grain size. These findings are beneficial to grow more ferroelectric-phase-dominant film, which mitigates its wake-up effect. From the wake-up test of the TDMA-Hf 0.5 Zr 0.5 O 2 film with a 2.8 MV/cm cycling field, the adverse wake-up effect was well suppressed up to 10 5 cycles, with a reasonably high double remanent polarization value of ~40 μC/cm 2 . The film also showed reliable switching up to 10 9 cycles with the 2.5 MV/cm cycling field without involving the wake-up effect but with the typical fatigue behavior." @default.
- W3014354503 created "2020-04-10" @default.
- W3014354503 creator A5002092276 @default.
- W3014354503 creator A5009003190 @default.
- W3014354503 creator A5015296818 @default.
- W3014354503 creator A5020830428 @default.
- W3014354503 creator A5027075775 @default.
- W3014354503 creator A5029089458 @default.
- W3014354503 creator A5034269173 @default.
- W3014354503 creator A5038909842 @default.
- W3014354503 creator A5059512060 @default.
- W3014354503 creator A5074806474 @default.
- W3014354503 creator A5091696487 @default.
- W3014354503 creator A5026118934 @default.
- W3014354503 date "2020-04-07" @default.
- W3014354503 modified "2023-10-10" @default.
- W3014354503 title "A Comparative Study on the Ferroelectric Performances in Atomic Layer Deposited Hf0.5Zr0.5O2 Thin Films Using Tetrakis(ethylmethylamino) and Tetrakis(dimethylamino) Precursors" @default.
- W3014354503 cites W1636395677 @default.
- W3014354503 cites W1647406517 @default.
- W3014354503 cites W1853470600 @default.
- W3014354503 cites W1894289757 @default.
- W3014354503 cites W1974359614 @default.
- W3014354503 cites W1997921153 @default.
- W3014354503 cites W2015897079 @default.
- W3014354503 cites W2018452678 @default.
- W3014354503 cites W2077212619 @default.
- W3014354503 cites W2078391136 @default.
- W3014354503 cites W2086097413 @default.
- W3014354503 cites W2099834391 @default.
- W3014354503 cites W2118921812 @default.
- W3014354503 cites W2119033937 @default.
- W3014354503 cites W2146158993 @default.
- W3014354503 cites W2158012362 @default.
- W3014354503 cites W2326935345 @default.
- W3014354503 cites W2334220755 @default.
- W3014354503 cites W2345091875 @default.
- W3014354503 cites W2346962696 @default.
- W3014354503 cites W2412580780 @default.
- W3014354503 cites W2443941261 @default.
- W3014354503 cites W2625135835 @default.
- W3014354503 cites W2734440321 @default.
- W3014354503 cites W2766858241 @default.
- W3014354503 cites W2772225823 @default.
- W3014354503 cites W2772734258 @default.
- W3014354503 cites W2781121986 @default.
- W3014354503 cites W2799717108 @default.
- W3014354503 cites W2801392758 @default.
- W3014354503 cites W2889470051 @default.
- W3014354503 cites W2899370067 @default.
- W3014354503 cites W2908553215 @default.
- W3014354503 cites W3105213179 @default.
- W3014354503 cites W4237473192 @default.
- W3014354503 doi "https://doi.org/10.1186/s11671-020-03301-4" @default.
- W3014354503 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/7138889" @default.
- W3014354503 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/32266598" @default.
- W3014354503 hasPublicationYear "2020" @default.
- W3014354503 type Work @default.
- W3014354503 sameAs 3014354503 @default.
- W3014354503 citedByCount "37" @default.
- W3014354503 countsByYear W30143545032020 @default.
- W3014354503 countsByYear W30143545032021 @default.
- W3014354503 countsByYear W30143545032022 @default.
- W3014354503 countsByYear W30143545032023 @default.
- W3014354503 crossrefType "journal-article" @default.
- W3014354503 hasAuthorship W3014354503A5002092276 @default.
- W3014354503 hasAuthorship W3014354503A5009003190 @default.
- W3014354503 hasAuthorship W3014354503A5015296818 @default.
- W3014354503 hasAuthorship W3014354503A5020830428 @default.
- W3014354503 hasAuthorship W3014354503A5026118934 @default.
- W3014354503 hasAuthorship W3014354503A5027075775 @default.
- W3014354503 hasAuthorship W3014354503A5029089458 @default.
- W3014354503 hasAuthorship W3014354503A5034269173 @default.
- W3014354503 hasAuthorship W3014354503A5038909842 @default.
- W3014354503 hasAuthorship W3014354503A5059512060 @default.
- W3014354503 hasAuthorship W3014354503A5074806474 @default.
- W3014354503 hasAuthorship W3014354503A5091696487 @default.
- W3014354503 hasBestOaLocation W30143545031 @default.
- W3014354503 hasConcept C113196181 @default.
- W3014354503 hasConcept C133386390 @default.
- W3014354503 hasConcept C147789679 @default.
- W3014354503 hasConcept C159985019 @default.
- W3014354503 hasConcept C171250308 @default.
- W3014354503 hasConcept C178790620 @default.
- W3014354503 hasConcept C180238147 @default.
- W3014354503 hasConcept C185592680 @default.
- W3014354503 hasConcept C19067145 @default.
- W3014354503 hasConcept C192191005 @default.
- W3014354503 hasConcept C192562407 @default.
- W3014354503 hasConcept C205049153 @default.
- W3014354503 hasConcept C49040817 @default.
- W3014354503 hasConcept C79090758 @default.
- W3014354503 hasConceptScore W3014354503C113196181 @default.
- W3014354503 hasConceptScore W3014354503C133386390 @default.
- W3014354503 hasConceptScore W3014354503C147789679 @default.
- W3014354503 hasConceptScore W3014354503C159985019 @default.
- W3014354503 hasConceptScore W3014354503C171250308 @default.
- W3014354503 hasConceptScore W3014354503C178790620 @default.
- W3014354503 hasConceptScore W3014354503C180238147 @default.
- W3014354503 hasConceptScore W3014354503C185592680 @default.
- W3014354503 hasConceptScore W3014354503C19067145 @default.