Matches in SemOpenAlex for { <https://semopenalex.org/work/W3014370511> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W3014370511 endingPage "175" @default.
- W3014370511 startingPage "170" @default.
- W3014370511 abstract "Transparent conductive films of indium oxide (In 2 O 3 ) are deposited on a glass substrate by RF magnetron sputtering and their electrical properties are investigated in relation to their microstructure. Sputtering deposition was carried out with variations of normalized substrate temperature (T s /T m where T m is the melting temperature) and argon partial pressure (P Ar ). At a very low substrate temperature (T s /T m < 0.1), the columnar grains with voided grain boundaries are observed in the In 2 O 3 films, which are attributed to the low surface mobility and atomic shadowing effect. With an increase in the substrate temperature, tight grain boundaries are formed between the growing columnar grains. At high temperature (0.3 < T s /T m < 0.5), the grain surface is faceted, which is due to the high surface mobility of the sputtered atoms, and development of preferred orientation with grain growth is promoted. The growing morphology is also dependent on the argon partial pressure. At low P Ar deposition, an inclined fibrous grain oriented to the target direction and a smooth surface structure is developed. As the P Ar increases, a dome-shaped surface structure and columnar grains normal to the substrate are developed due to the scattering effect of the sputtered atoms. The growing morphology with substrate temperature and argon pressure coincides with the Thornton's Structure Zone Model (SZM). The lowest electrical resistivity (2.1×10 -2 Ωcm) is observed in the In 2 O 3 films with tight grain boundaries and faceted grains, which corresponds to zone II region of the SZM." @default.
- W3014370511 created "2020-04-10" @default.
- W3014370511 creator A5012945820 @default.
- W3014370511 creator A5052531602 @default.
- W3014370511 date "2020-03-01" @default.
- W3014370511 modified "2023-09-26" @default.
- W3014370511 title "Grain Structure and Electrical Properties of Transparent Indium Oxide Thin Films Prepared by RF Magnetron Sputtering" @default.
- W3014370511 cites W1985772856 @default.
- W3014370511 cites W2003863685 @default.
- W3014370511 cites W2025642067 @default.
- W3014370511 cites W2040179900 @default.
- W3014370511 cites W2042705332 @default.
- W3014370511 cites W2049918167 @default.
- W3014370511 cites W2070023439 @default.
- W3014370511 cites W2076137430 @default.
- W3014370511 cites W2084926312 @default.
- W3014370511 cites W2093342403 @default.
- W3014370511 cites W2526941380 @default.
- W3014370511 cites W2583003635 @default.
- W3014370511 cites W2736692148 @default.
- W3014370511 doi "https://doi.org/10.4028/www.scientific.net/ddf.400.170" @default.
- W3014370511 hasPublicationYear "2020" @default.
- W3014370511 type Work @default.
- W3014370511 sameAs 3014370511 @default.
- W3014370511 citedByCount "0" @default.
- W3014370511 crossrefType "journal-article" @default.
- W3014370511 hasAuthorship W3014370511A5012945820 @default.
- W3014370511 hasAuthorship W3014370511A5052531602 @default.
- W3014370511 hasConcept C111368507 @default.
- W3014370511 hasConcept C113196181 @default.
- W3014370511 hasConcept C119599485 @default.
- W3014370511 hasConcept C127313418 @default.
- W3014370511 hasConcept C127413603 @default.
- W3014370511 hasConcept C159985019 @default.
- W3014370511 hasConcept C171250308 @default.
- W3014370511 hasConcept C178790620 @default.
- W3014370511 hasConcept C185592680 @default.
- W3014370511 hasConcept C19067145 @default.
- W3014370511 hasConcept C191897082 @default.
- W3014370511 hasConcept C192191005 @default.
- W3014370511 hasConcept C192562407 @default.
- W3014370511 hasConcept C22423302 @default.
- W3014370511 hasConcept C2777289219 @default.
- W3014370511 hasConcept C2779851234 @default.
- W3014370511 hasConcept C43617362 @default.
- W3014370511 hasConcept C47908070 @default.
- W3014370511 hasConcept C543292547 @default.
- W3014370511 hasConcept C547737533 @default.
- W3014370511 hasConcept C61427134 @default.
- W3014370511 hasConcept C69990965 @default.
- W3014370511 hasConcept C87976508 @default.
- W3014370511 hasConceptScore W3014370511C111368507 @default.
- W3014370511 hasConceptScore W3014370511C113196181 @default.
- W3014370511 hasConceptScore W3014370511C119599485 @default.
- W3014370511 hasConceptScore W3014370511C127313418 @default.
- W3014370511 hasConceptScore W3014370511C127413603 @default.
- W3014370511 hasConceptScore W3014370511C159985019 @default.
- W3014370511 hasConceptScore W3014370511C171250308 @default.
- W3014370511 hasConceptScore W3014370511C178790620 @default.
- W3014370511 hasConceptScore W3014370511C185592680 @default.
- W3014370511 hasConceptScore W3014370511C19067145 @default.
- W3014370511 hasConceptScore W3014370511C191897082 @default.
- W3014370511 hasConceptScore W3014370511C192191005 @default.
- W3014370511 hasConceptScore W3014370511C192562407 @default.
- W3014370511 hasConceptScore W3014370511C22423302 @default.
- W3014370511 hasConceptScore W3014370511C2777289219 @default.
- W3014370511 hasConceptScore W3014370511C2779851234 @default.
- W3014370511 hasConceptScore W3014370511C43617362 @default.
- W3014370511 hasConceptScore W3014370511C47908070 @default.
- W3014370511 hasConceptScore W3014370511C543292547 @default.
- W3014370511 hasConceptScore W3014370511C547737533 @default.
- W3014370511 hasConceptScore W3014370511C61427134 @default.
- W3014370511 hasConceptScore W3014370511C69990965 @default.
- W3014370511 hasConceptScore W3014370511C87976508 @default.
- W3014370511 hasLocation W30143705111 @default.
- W3014370511 hasOpenAccess W3014370511 @default.
- W3014370511 hasPrimaryLocation W30143705111 @default.
- W3014370511 hasRelatedWork W1976068479 @default.
- W3014370511 hasRelatedWork W1995810423 @default.
- W3014370511 hasRelatedWork W2009469984 @default.
- W3014370511 hasRelatedWork W2077106834 @default.
- W3014370511 hasRelatedWork W2081874730 @default.
- W3014370511 hasRelatedWork W2249114551 @default.
- W3014370511 hasRelatedWork W2316948141 @default.
- W3014370511 hasRelatedWork W2373579184 @default.
- W3014370511 hasRelatedWork W2388498853 @default.
- W3014370511 hasRelatedWork W2392638099 @default.
- W3014370511 hasVolume "400" @default.
- W3014370511 isParatext "false" @default.
- W3014370511 isRetracted "false" @default.
- W3014370511 magId "3014370511" @default.
- W3014370511 workType "article" @default.