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- W3015288962 abstract "Finding a process window and improving the yield for EUV single exposure nodes requires an understanding of stochastic defects. Stochastic simulations can be used as a tool to understand the influence of the process on defectivity. This presentation introduces stochastic model calibration with the purpose of matching lithographic observables. The validity of this approach will be shown based on comparison of measured defectivity data and matching stochastic simulations." @default.
- W3015288962 created "2020-04-17" @default.
- W3015288962 creator A5006961880 @default.
- W3015288962 date "2020-03-24" @default.
- W3015288962 modified "2023-09-26" @default.
- W3015288962 title "Rigorous stochastic lithography modelling for defectivity reduction in EUV single expose patterning (Conference Presentation)" @default.
- W3015288962 doi "https://doi.org/10.1117/12.2551876" @default.
- W3015288962 hasPublicationYear "2020" @default.
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