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• W3015409992 endingPage "155003" @default.
• W3015409992 startingPage "155003" @default.
• W3015409992 abstract "The effect of thermal treatment on zirconium carbide (ZrC) layers deposited by chemical vapour deposition process was investigated using X-ray diffraction (XRD), Raman spectroscopy, nanoindention and scanning electron microscopy (SEM). The ZrC layers deposited at 1400 °C (composed of 96% ZrC and 4% C) were annealed at 1500, 1600, 1700 and 1800 °C for 2 h under high vacuum of 2.6 × 10−7 mbar. After annealing, the lattice constant and the average crystallite sizes were found to increase whereas the lattice strain and dislocation density decreased. The preferred orientation of the as-deposited layers was (220); it changed to (200) when annealed at 1500 °C and 1600 °C. At annealing temperature of 1700 °C and 1800 °C, the preferred orientation was (220) just like for the as-deposited ZrC layers. From Raman spectroscopy analysis, the ID/IG ratio reduced from 0.694 to 0.414 with annealing temperature indicating an improvement in crystallinity level and a decrease in the defects in the carbon material in the ZrC layers. The hardness of the layers was found to decrease slightly with annealing temperature from 26.4 ± 0.6 GPa to 21.3 ± 0.5 GPa. Some voids initially present in the as-deposited ZrC layers closed up and particles increased in size with annealing temperature." @default.
• W3015409992 created "2020-04-17" @default.
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• W3015409992 date "2020-09-01" @default.
• W3015409992 modified "2023-10-18" @default.
• W3015409992 title "Investigating the thermal stability of the chemical vapour deposited zirconium carbide layers" @default.
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• W3015409992 doi "https://doi.org/10.1016/j.jallcom.2020.155003" @default.
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