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- W3015758359 abstract "A CMOS-compatible through-silicon-via (TSV) process is reported for the first time, in which a via-first silicon TSV is fabricated to obtain small-footprint structures with high-quality insulating layers. Following CMOS processes, the silicon in TSV is replaced by an Au-Si eutectic alloy with thermomigration of Au to achieve low serial resistance. Because the process temperature is higher than the melting point of the eutectic alloy, it takes less than 50 min to replace the $50-mumathrm{m}$ -thick silicon TSV with the eutectic alloy. With this method, the serial resistances of the via-first silicon TSVs decrease drastically to approximately $1.1 Omega$ ." @default.
- W3015758359 created "2020-04-17" @default.
- W3015758359 creator A5000602292 @default.
- W3015758359 creator A5001401091 @default.
- W3015758359 creator A5014986106 @default.
- W3015758359 creator A5016572507 @default.
- W3015758359 creator A5060345691 @default.
- W3015758359 creator A5084291391 @default.
- W3015758359 date "2020-01-01" @default.
- W3015758359 modified "2023-09-27" @default.
- W3015758359 title "CMOS Compatible TSV Process with Post-CMOS Thermomigration Refilling of Au-Si Eutectic Alloy" @default.
- W3015758359 cites W1989369260 @default.
- W3015758359 cites W1998290008 @default.
- W3015758359 cites W2027456444 @default.
- W3015758359 cites W2039720442 @default.
- W3015758359 cites W2048825472 @default.
- W3015758359 cites W2121007654 @default.
- W3015758359 cites W2137178805 @default.
- W3015758359 cites W2745314704 @default.
- W3015758359 cites W2767837949 @default.
- W3015758359 doi "https://doi.org/10.1109/mems46641.2020.9056293" @default.
- W3015758359 hasPublicationYear "2020" @default.
- W3015758359 type Work @default.
- W3015758359 sameAs 3015758359 @default.
- W3015758359 citedByCount "1" @default.
- W3015758359 countsByYear W30157583592021 @default.
- W3015758359 crossrefType "proceedings-article" @default.
- W3015758359 hasAuthorship W3015758359A5000602292 @default.
- W3015758359 hasAuthorship W3015758359A5001401091 @default.
- W3015758359 hasAuthorship W3015758359A5014986106 @default.
- W3015758359 hasAuthorship W3015758359A5016572507 @default.
- W3015758359 hasAuthorship W3015758359A5060345691 @default.
- W3015758359 hasAuthorship W3015758359A5084291391 @default.
- W3015758359 hasConcept C133074676 @default.
- W3015758359 hasConcept C18168003 @default.
- W3015758359 hasConcept C191897082 @default.
- W3015758359 hasConcept C192562407 @default.
- W3015758359 hasConcept C2780026712 @default.
- W3015758359 hasConcept C37487178 @default.
- W3015758359 hasConcept C45632049 @default.
- W3015758359 hasConcept C46362747 @default.
- W3015758359 hasConcept C49040817 @default.
- W3015758359 hasConcept C544956773 @default.
- W3015758359 hasConceptScore W3015758359C133074676 @default.
- W3015758359 hasConceptScore W3015758359C18168003 @default.
- W3015758359 hasConceptScore W3015758359C191897082 @default.
- W3015758359 hasConceptScore W3015758359C192562407 @default.
- W3015758359 hasConceptScore W3015758359C2780026712 @default.
- W3015758359 hasConceptScore W3015758359C37487178 @default.
- W3015758359 hasConceptScore W3015758359C45632049 @default.
- W3015758359 hasConceptScore W3015758359C46362747 @default.
- W3015758359 hasConceptScore W3015758359C49040817 @default.
- W3015758359 hasConceptScore W3015758359C544956773 @default.
- W3015758359 hasLocation W30157583591 @default.
- W3015758359 hasOpenAccess W3015758359 @default.
- W3015758359 hasPrimaryLocation W30157583591 @default.
- W3015758359 hasRelatedWork W11523467 @default.
- W3015758359 hasRelatedWork W13877503 @default.
- W3015758359 hasRelatedWork W16067723 @default.
- W3015758359 hasRelatedWork W23442991 @default.
- W3015758359 hasRelatedWork W30877532 @default.
- W3015758359 hasRelatedWork W37294526 @default.
- W3015758359 hasRelatedWork W40621485 @default.
- W3015758359 hasRelatedWork W48155205 @default.
- W3015758359 hasRelatedWork W4841456 @default.
- W3015758359 hasRelatedWork W6085139 @default.
- W3015758359 isParatext "false" @default.
- W3015758359 isRetracted "false" @default.
- W3015758359 magId "3015758359" @default.
- W3015758359 workType "article" @default.