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- W3016919159 abstract "A reflective intensity-modulated fiber-optic sensor based on microelectromechanical systems (MEMS) for pressure measurements is proposed and experimentally demonstrated. The sensor consists of two multimode optical fibers with a spherical end, a quartz tube with dual holes, a silicon sensitive diaphragm, and a high borosilicate glass substrate (HBGS). The integrated sensor has a high sensitivity due to the MEMS technique and the spherical end of the fiber. The results show that the sensor achieves a pressure sensitivity of approximately 0.139 mV/kPa. The temperature coefficient of the proposed sensor is about 0.87 mV/°C over the range of 20 °C to 150 °C. Furthermore, due to the intensity mechanism, the sensor has a relatively simple demodulation system and can respond to high-frequency pressure in real time. The dynamic response of the sensor was verified in a 1 kHz sinusoidal pressure environment at room temperature." @default.
- W3016919159 created "2020-04-24" @default.
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- W3016919159 date "2020-04-15" @default.
- W3016919159 modified "2023-09-29" @default.
- W3016919159 title "MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements" @default.
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- W3016919159 doi "https://doi.org/10.3390/s20082233" @default.
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