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- W3017056754 abstract "Evert Polak underestimates the speed of the lithography market, is roundly criticized, and then saddles his engineers with a grueling task." @default.
- W3017056754 created "2020-04-24" @default.
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- W3017056754 date "2019-12-15" @default.
- W3017056754 modified "2023-09-23" @default.
- W3017056754 title "Turbo Mode Engaged" @default.
- W3017056754 doi "https://doi.org/10.1117/3.2572060.ch60" @default.
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