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• W3017936746 endingPage "1691" @default.
• W3017936746 startingPage "1691" @default.
• W3017936746 abstract "Structural analysis of periodic samples with lensless imaging techniques in the extreme ultraviolet spectral range is an important and versatile tool for inspecting nanoscale structures including lithographic masks and quasi-crystals. More specifically ptychography is the method of choice for imaging such structures with high lateral resolution and an arbitrarily large field-of-view. This work reports on the reconstruction of highly periodic samples that occasionally contain isolated defects. For a realistic scenario scan map distortions, i.e. the actual scanning position does not exactly coincide with the position used as input for the reconstruction code, were taken into account. For such conditions it is well known, that the reconstruction will not provide always a physical reliable image. It will be shown, that the reconstructed illumination function is very sensitive to map distortions and small defects in otherwise periodic objects allowing to decide whether the reconstructed object is reliable or not. Applying this criterion the minimum detectable size of local defects in otherwise periodic structures will be compared to both the period length and the magnitude of the scan map distortion. As both quantities are usually much larger than the resolution given by the wavelength and numerical aperture of the imaging setup, they determine the resolution limit." @default.
• W3017936746 created "2020-05-01" @default.
• W3017936746 creator A5003592165 @default.
• W3017936746 creator A5008934693 @default.
• W3017936746 creator A5021177224 @default.
• W3017936746 creator A5029050029 @default.
• W3017936746 creator A5051370194 @default.
• W3017936746 creator A5090498386 @default.
• W3017936746 date "2020-06-14" @default.
• W3017936746 modified "2023-09-26" @default.
• W3017936746 title "Reliability of ptychography on periodic structures" @default.
• W3017936746 cites W1748883184 @default.
• W3017936746 cites W1990128027 @default.
• W3017936746 cites W1994819595 @default.
• W3017936746 cites W2002849329 @default.
• W3017936746 cites W2009741028 @default.
• W3017936746 cites W2013280482 @default.
• W3017936746 cites W2026466737 @default.
• W3017936746 cites W2050709101 @default.
• W3017936746 cites W2100428441 @default.
• W3017936746 cites W2165161875 @default.
• W3017936746 cites W2595276417 @default.
• W3017936746 cites W2597958772 @default.
• W3017936746 cites W2737983824 @default.
• W3017936746 cites W2769042330 @default.
• W3017936746 cites W2772629285 @default.
• W3017936746 cites W2783649616 @default.
• W3017936746 cites W2799604428 @default.
• W3017936746 cites W2899782142 @default.
• W3017936746 cites W2967362625 @default.
• W3017936746 cites W3099666887 @default.
• W3017936746 cites W4256014828 @default.
• W3017936746 doi "https://doi.org/10.1364/osac.394384" @default.
• W3017936746 hasPublicationYear "2020" @default.
• W3017936746 type Work @default.
• W3017936746 sameAs 3017936746 @default.
• W3017936746 citedByCount "3" @default.
• W3017936746 countsByYear W30179367462021 @default.
• W3017936746 countsByYear W30179367462022 @default.
• W3017936746 crossrefType "journal-article" @default.
• W3017936746 hasAuthorship W3017936746A5003592165 @default.
• W3017936746 hasAuthorship W3017936746A5008934693 @default.
• W3017936746 hasAuthorship W3017936746A5021177224 @default.
• W3017936746 hasAuthorship W3017936746A5029050029 @default.
• W3017936746 hasAuthorship W3017936746A5051370194 @default.
• W3017936746 hasAuthorship W3017936746A5090498386 @default.
• W3017936746 hasBestOaLocation W30179367461 @default.
• W3017936746 hasConcept C10138342 @default.
• W3017936746 hasConcept C120665830 @default.
• W3017936746 hasConcept C121332964 @default.
• W3017936746 hasConcept C126780896 @default.
• W3017936746 hasConcept C138268822 @default.
• W3017936746 hasConcept C154945302 @default.
• W3017936746 hasConcept C162324750 @default.
• W3017936746 hasConcept C194257627 @default.
• W3017936746 hasConcept C198082294 @default.
• W3017936746 hasConcept C205372480 @default.
• W3017936746 hasConcept C207114421 @default.
• W3017936746 hasConcept C24890656 @default.
• W3017936746 hasConcept C2779464207 @default.
• W3017936746 hasConcept C41008148 @default.
• W3017936746 hasConcept C46362747 @default.
• W3017936746 hasConcept C49040817 @default.
• W3017936746 hasConcept C6260449 @default.
• W3017936746 hasConcept C78153596 @default.
• W3017936746 hasConcept C78336883 @default.
• W3017936746 hasConcept C94915269 @default.
• W3017936746 hasConceptScore W3017936746C10138342 @default.
• W3017936746 hasConceptScore W3017936746C120665830 @default.
• W3017936746 hasConceptScore W3017936746C121332964 @default.
• W3017936746 hasConceptScore W3017936746C126780896 @default.
• W3017936746 hasConceptScore W3017936746C138268822 @default.
• W3017936746 hasConceptScore W3017936746C154945302 @default.
• W3017936746 hasConceptScore W3017936746C162324750 @default.
• W3017936746 hasConceptScore W3017936746C194257627 @default.
• W3017936746 hasConceptScore W3017936746C198082294 @default.
• W3017936746 hasConceptScore W3017936746C205372480 @default.
• W3017936746 hasConceptScore W3017936746C207114421 @default.
• W3017936746 hasConceptScore W3017936746C24890656 @default.
• W3017936746 hasConceptScore W3017936746C2779464207 @default.
• W3017936746 hasConceptScore W3017936746C41008148 @default.
• W3017936746 hasConceptScore W3017936746C46362747 @default.
• W3017936746 hasConceptScore W3017936746C49040817 @default.
• W3017936746 hasConceptScore W3017936746C6260449 @default.
• W3017936746 hasConceptScore W3017936746C78153596 @default.
• W3017936746 hasConceptScore W3017936746C78336883 @default.
• W3017936746 hasConceptScore W3017936746C94915269 @default.
• W3017936746 hasFunder F4320338080 @default.
• W3017936746 hasIssue "6" @default.
• W3017936746 hasLocation W30179367461 @default.
• W3017936746 hasOpenAccess W3017936746 @default.
• W3017936746 hasPrimaryLocation W30179367461 @default.
• W3017936746 hasRelatedWork W1884158221 @default.
• W3017936746 hasRelatedWork W1994779956 @default.
• W3017936746 hasRelatedWork W2005200026 @default.
• W3017936746 hasRelatedWork W2035326386 @default.
• W3017936746 hasRelatedWork W2058988517 @default.
• W3017936746 hasRelatedWork W2085273512 @default.

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