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- W3018288718 endingPage "155221" @default.
- W3018288718 startingPage "155221" @default.
- W3018288718 abstract "Abstract In this work, sol–gel ZnO thin films were implanted with Al ions of various fluences to study their electrical transport properties as transparent conducting oxide (TCO) layers. Additionally, formation of structural defects and modifications of the optical emission properties due to implantation have been investigated extensively to correlate the resultant electrical properties. By varying the ion fluence over two orders of magnitude from 1 × 1013 to 6 × 1015 ions/cm2, interestingly the electrical transport properties have been seen to be degraded in an unexpected manner as soon as Al is implanted and beyond a certain fluence (5 × 1013 ions/cm2), the electrical properties begin to improve. For the highest fluence (6 × 1015 ions/cm2), the sheet resistance is found to be 156 Ω/sq with an average visible transmission of 82%. The figure of merit value of our Al implanted ZnO film for an Al fluence of 5 × 1015 ions/cm2 is the highest till date, which may be prospective as a TCO layer. Detailed investigation on the evolution of the electrical and photoluminescence properties with an increase in the Al ion fluence reveals that zinc vacancy type defects are formed in large number which on healing produces further higher conductivity in the films." @default.
- W3018288718 created "2020-05-01" @default.
- W3018288718 creator A5025777424 @default.
- W3018288718 creator A5062951249 @default.
- W3018288718 creator A5065733635 @default.
- W3018288718 creator A5089194296 @default.
- W3018288718 date "2020-09-01" @default.
- W3018288718 modified "2023-10-16" @default.
- W3018288718 title "High conductivity along with high visible light transparency in Al implanted sol-gel ZnO thin film with an elevated figure of merit value as a transparent conducting layer" @default.
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