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- W3018367946 abstract "Sub-nanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the detection of differential photocurrent signals from photodiodes, with resolution in the nanometer range. Here, we present an integrated in-plane displacement sensor based on a nanoelectromechanical trampoline resonator. With a position resolution of 4 $pm/Hz^{1/2}$ for a low laser power of 85 $mu$W and a repeatability of 2 nm after 5 cycles of operation as well as good long-term stability, this new detection principle provides a reliable alternative for overcoming the current position detection limit in a wide variety of research and application fields." @default.
- W3018367946 created "2020-05-01" @default.
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- W3018367946 date "2020-04-22" @default.
- W3018367946 modified "2023-09-26" @default.
- W3018367946 title "A nanoelectromechanical position-sensitive detector with picometer resolution" @default.
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