FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3019109875> ?p ?o ?g. }

• W3019109875 endingPage "109397" @default.
• W3019109875 startingPage "109397" @default.
• W3019109875 abstract "A novel type of compound, namely Si-guanidinate, where the Si center of alkylsilyl is linked with pyrrolyl-guanidinate ligand, has been synthesized as potential chemical vapor deposition (CVD) precursor and characterized by 1H, 13C, EI-MS, and elemental analysis. The thermal properties of the Si-guanidinate, including vapor pressure and thermal stabilities which were investigated by simultaneous thermal analyses (STA) exhibit a promising precursor in CVD process. The Si-guanidinate was used as a single-source liquid organosilicone precursor to deposit silicon carbon nitride (SiCN) films with the helicon plasma-enhanced chemical vapor deposition (HWP-CVD) method. The effect of the substrate pules negative bias voltage (-Vs) on the microstructure, morphology, composition and optical properties (including refractive index) of the SiCN films has been studied. The deposition rate of the films exhibits a maximum of 15.3 μm/min, which is contributed by the high-density plasma generation of HWP. By X-ray photoelectron spectroscopy (XPS) analysis, the film is mainly composed of Si–C–N. The SiCN films deposited at -VS of 1500 V appear to be high N content of 30.0% (k = 1.83) materials with quite small surface roughness (Root mean square (RMS)~0.7 nm)." @default.
• W3019109875 created "2020-05-01" @default.
• W3019109875 creator A5019204475 @default.
• W3019109875 creator A5032855719 @default.
• W3019109875 creator A5052305743 @default.
• W3019109875 creator A5055170617 @default.
• W3019109875 creator A5059055214 @default.
• W3019109875 date "2020-07-01" @default.
• W3019109875 modified "2023-10-02" @default.
• W3019109875 title "High-rate synthesis of SiCN films using single-source silicon precursor with high-density helicon plasma" @default.
• W3019109875 cites W150676421 @default.
• W3019109875 cites W1520554845 @default.
• W3019109875 cites W1851142677 @default.
• W3019109875 cites W1964750772 @default.
• W3019109875 cites W1966086071 @default.
• W3019109875 cites W1977243723 @default.
• W3019109875 cites W1988644720 @default.
• W3019109875 cites W1993720052 @default.
• W3019109875 cites W1994632941 @default.
• W3019109875 cites W1995241834 @default.
• W3019109875 cites W1999304425 @default.
• W3019109875 cites W2006505537 @default.
• W3019109875 cites W2023862683 @default.
• W3019109875 cites W2027680240 @default.
• W3019109875 cites W2035974690 @default.
• W3019109875 cites W2042937424 @default.
• W3019109875 cites W2066068050 @default.
• W3019109875 cites W2080000404 @default.
• W3019109875 cites W2099402126 @default.
• W3019109875 cites W2102071169 @default.
• W3019109875 cites W2126427903 @default.
• W3019109875 cites W2131468188 @default.
• W3019109875 cites W2139752692 @default.
• W3019109875 cites W2161449390 @default.
• W3019109875 cites W2406003768 @default.
• W3019109875 cites W2530631688 @default.
• W3019109875 cites W2615311637 @default.
• W3019109875 cites W2810424770 @default.
• W3019109875 cites W2882512654 @default.
• W3019109875 cites W2923461249 @default.
• W3019109875 doi "https://doi.org/10.1016/j.vacuum.2020.109397" @default.
• W3019109875 hasPublicationYear "2020" @default.
• W3019109875 type Work @default.
• W3019109875 sameAs 3019109875 @default.
• W3019109875 citedByCount "5" @default.
• W3019109875 countsByYear W30191098752020 @default.
• W3019109875 countsByYear W30191098752022 @default.
• W3019109875 countsByYear W30191098752023 @default.
• W3019109875 crossrefType "journal-article" @default.
• W3019109875 hasAuthorship W3019109875A5019204475 @default.
• W3019109875 hasAuthorship W3019109875A5032855719 @default.
• W3019109875 hasAuthorship W3019109875A5052305743 @default.
• W3019109875 hasAuthorship W3019109875A5055170617 @default.
• W3019109875 hasAuthorship W3019109875A5059055214 @default.
• W3019109875 hasConcept C111368507 @default.
• W3019109875 hasConcept C113196181 @default.
• W3019109875 hasConcept C121332964 @default.
• W3019109875 hasConcept C127313418 @default.
• W3019109875 hasConcept C127413603 @default.
• W3019109875 hasConcept C161790260 @default.
• W3019109875 hasConcept C171250308 @default.
• W3019109875 hasConcept C175708663 @default.
• W3019109875 hasConcept C178790620 @default.
• W3019109875 hasConcept C185592680 @default.
• W3019109875 hasConcept C192562407 @default.
• W3019109875 hasConcept C2777289219 @default.
• W3019109875 hasConcept C2777492770 @default.
• W3019109875 hasConcept C2779123320 @default.
• W3019109875 hasConcept C38347018 @default.
• W3019109875 hasConcept C42360764 @default.
• W3019109875 hasConcept C49040817 @default.
• W3019109875 hasConcept C544956773 @default.
• W3019109875 hasConcept C57410435 @default.
• W3019109875 hasConcept C62520636 @default.
• W3019109875 hasConcept C65165184 @default.
• W3019109875 hasConcept C82706917 @default.
• W3019109875 hasConceptScore W3019109875C111368507 @default.
• W3019109875 hasConceptScore W3019109875C113196181 @default.
• W3019109875 hasConceptScore W3019109875C121332964 @default.
• W3019109875 hasConceptScore W3019109875C127313418 @default.
• W3019109875 hasConceptScore W3019109875C127413603 @default.
• W3019109875 hasConceptScore W3019109875C161790260 @default.
• W3019109875 hasConceptScore W3019109875C171250308 @default.
• W3019109875 hasConceptScore W3019109875C175708663 @default.
• W3019109875 hasConceptScore W3019109875C178790620 @default.
• W3019109875 hasConceptScore W3019109875C185592680 @default.
• W3019109875 hasConceptScore W3019109875C192562407 @default.
• W3019109875 hasConceptScore W3019109875C2777289219 @default.
• W3019109875 hasConceptScore W3019109875C2777492770 @default.
• W3019109875 hasConceptScore W3019109875C2779123320 @default.
• W3019109875 hasConceptScore W3019109875C38347018 @default.
• W3019109875 hasConceptScore W3019109875C42360764 @default.
• W3019109875 hasConceptScore W3019109875C49040817 @default.
• W3019109875 hasConceptScore W3019109875C544956773 @default.
• W3019109875 hasConceptScore W3019109875C57410435 @default.
• W3019109875 hasConceptScore W3019109875C62520636 @default.
• W3019109875 hasConceptScore W3019109875C65165184 @default.
• W3019109875 hasConceptScore W3019109875C82706917 @default.

• next