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• W3019865921 endingPage "146392" @default.
• W3019865921 startingPage "146392" @default.
• W3019865921 abstract "The porous silicon (PS) based emitter has proven to be a promising cold cathode as the vacuum microelectronic device. With a view to further optimization of the cold emission property of the PS-based emitter, multilayered PS with two different porosity sequences were fabricated. The microstructure and the oxidation property of the multilayered PS were systematically characterized by scanning electron microscope, atomic force microscope, energy-dispersive X-ray spectroscopy, and X-ray photoelectron spectroscopy. The cold emission performance of the PS-based emitter was also measured in vacuum. The experiment results indicated that the PS layer with L-H structure can bring great advantages in the improvement of the emission efficiency by suppressing the diode current and increasing the emission current compared with H-L structure. By further analysis, the improved cold emission performance for the PS with L-H structure can be attributed to the optimization of the electrical field distribution near the PS surface region and the enhanced oxidation property of PS. This work experimentally demonstrated that the cold emission property of the PS-based emitter can be further optimized by modulating the porosity sequence of the multilayered PS. It would help to advance the silicon-based cold cathodes for vacuum microelectronics, especially for large-area applications." @default.
• W3019865921 created "2020-05-01" @default.
• W3019865921 creator A5044579853 @default.
• W3019865921 creator A5058689473 @default.
• W3019865921 creator A5078697986 @default.
• W3019865921 date "2020-08-01" @default.
• W3019865921 modified "2023-09-23" @default.
• W3019865921 title "Improved cold emission property of the multilayer porous silicon by modulating the porosity sequence" @default.
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• W3019865921 doi "https://doi.org/10.1016/j.apsusc.2020.146392" @default.
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