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- W3022269899 abstract "It is essential to monitor the vacuum deposition process to verify the coating is being deposited. Where there is a plasma as part of the deposition process it is possible to monitor the deposition process in real time using the light produced in the plasma. When the process goes wrong it is important to be able to monitor various factors such as gas composition, and techniques for this are described. Once the coating has been deposited it is also required to confirm that the coating meets the target specification using measurements to verify the functionality of the coating. Techniques for measuring the coating thickness, optical, electrical, and barrier properties are described." @default.
- W3022269899 created "2020-05-13" @default.
- W3022269899 creator A5010284552 @default.
- W3022269899 date "2015-01-01" @default.
- W3022269899 modified "2023-10-14" @default.
- W3022269899 title "Process Diagnostics and Coating Characteristics" @default.
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- W3022269899 doi "https://doi.org/10.1016/b978-0-323-29644-1.00005-0" @default.
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