Matches in SemOpenAlex for { <https://semopenalex.org/work/W3022396483> ?p ?o ?g. }
- W3022396483 abstract "Abstract Extreme ultraviolet (EUV) lithography is currently entering high-volume manufacturing to enable the continued miniaturization of semiconductor devices. The required EUV light, at 13.5 nm wavelength, is produced in a hot and dense laser-driven tin plasma. The atomic origins of this light are demonstrably poorly understood. Here we calculate detailed tin opacity spectra using the Los Alamos atomic physics suite ATOMIC and validate these calculations with experimental comparisons. Our key finding is that EUV light largely originates from transitions between multiply-excited states, and not from the singly-excited states decaying to the ground state as is the current paradigm. Moreover, we find that transitions between these multiply-excited states also contribute in the same narrow window around 13.5 nm as those originating from singly-excited states, and this striking property holds over a wide range of charge states. We thus reveal the doubly magic behavior of tin and the origins of the EUV light." @default.
- W3022396483 created "2020-05-13" @default.
- W3022396483 creator A5004179651 @default.
- W3022396483 creator A5014834099 @default.
- W3022396483 creator A5025024917 @default.
- W3022396483 creator A5039934016 @default.
- W3022396483 creator A5046110011 @default.
- W3022396483 creator A5054232814 @default.
- W3022396483 creator A5063355892 @default.
- W3022396483 creator A5063954694 @default.
- W3022396483 creator A5065011861 @default.
- W3022396483 creator A5070559712 @default.
- W3022396483 creator A5076443503 @default.
- W3022396483 creator A5085084861 @default.
- W3022396483 date "2020-05-11" @default.
- W3022396483 modified "2023-10-11" @default.
- W3022396483 title "Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography" @default.
- W3022396483 cites W1194887468 @default.
- W3022396483 cites W1590503022 @default.
- W3022396483 cites W1607441963 @default.
- W3022396483 cites W1978961017 @default.
- W3022396483 cites W1989894913 @default.
- W3022396483 cites W1993779044 @default.
- W3022396483 cites W2002327079 @default.
- W3022396483 cites W2004208870 @default.
- W3022396483 cites W2017546790 @default.
- W3022396483 cites W2027349685 @default.
- W3022396483 cites W2038443881 @default.
- W3022396483 cites W2043063493 @default.
- W3022396483 cites W2057354882 @default.
- W3022396483 cites W2069099029 @default.
- W3022396483 cites W2074441052 @default.
- W3022396483 cites W2082063942 @default.
- W3022396483 cites W2083770598 @default.
- W3022396483 cites W2084215271 @default.
- W3022396483 cites W2085164432 @default.
- W3022396483 cites W2086194748 @default.
- W3022396483 cites W2104487922 @default.
- W3022396483 cites W2104525067 @default.
- W3022396483 cites W2134322129 @default.
- W3022396483 cites W2254450385 @default.
- W3022396483 cites W2275268174 @default.
- W3022396483 cites W2387746504 @default.
- W3022396483 cites W2475987316 @default.
- W3022396483 cites W2501929427 @default.
- W3022396483 cites W2511470709 @default.
- W3022396483 cites W2560486144 @default.
- W3022396483 cites W2598949656 @default.
- W3022396483 cites W2601569420 @default.
- W3022396483 cites W2603490095 @default.
- W3022396483 cites W2726641506 @default.
- W3022396483 cites W2954259115 @default.
- W3022396483 cites W2956830420 @default.
- W3022396483 cites W2974131647 @default.
- W3022396483 cites W2975639389 @default.
- W3022396483 cites W3035572042 @default.
- W3022396483 cites W3100242561 @default.
- W3022396483 cites W3104510216 @default.
- W3022396483 cites W4235257426 @default.
- W3022396483 doi "https://doi.org/10.1038/s41467-020-15678-y" @default.
- W3022396483 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/7214432" @default.
- W3022396483 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/32393789" @default.
- W3022396483 hasPublicationYear "2020" @default.
- W3022396483 type Work @default.
- W3022396483 sameAs 3022396483 @default.
- W3022396483 citedByCount "55" @default.
- W3022396483 countsByYear W30223964832020 @default.
- W3022396483 countsByYear W30223964832021 @default.
- W3022396483 countsByYear W30223964832022 @default.
- W3022396483 countsByYear W30223964832023 @default.
- W3022396483 crossrefType "journal-article" @default.
- W3022396483 hasAuthorship W3022396483A5004179651 @default.
- W3022396483 hasAuthorship W3022396483A5014834099 @default.
- W3022396483 hasAuthorship W3022396483A5025024917 @default.
- W3022396483 hasAuthorship W3022396483A5039934016 @default.
- W3022396483 hasAuthorship W3022396483A5046110011 @default.
- W3022396483 hasAuthorship W3022396483A5054232814 @default.
- W3022396483 hasAuthorship W3022396483A5063355892 @default.
- W3022396483 hasAuthorship W3022396483A5063954694 @default.
- W3022396483 hasAuthorship W3022396483A5065011861 @default.
- W3022396483 hasAuthorship W3022396483A5070559712 @default.
- W3022396483 hasAuthorship W3022396483A5076443503 @default.
- W3022396483 hasAuthorship W3022396483A5085084861 @default.
- W3022396483 hasBestOaLocation W30223964831 @default.
- W3022396483 hasConcept C120665830 @default.
- W3022396483 hasConcept C121332964 @default.
- W3022396483 hasConcept C146024833 @default.
- W3022396483 hasConcept C162996421 @default.
- W3022396483 hasConcept C181500209 @default.
- W3022396483 hasConcept C184779094 @default.
- W3022396483 hasConcept C191897082 @default.
- W3022396483 hasConcept C192562407 @default.
- W3022396483 hasConcept C204223013 @default.
- W3022396483 hasConcept C49040817 @default.
- W3022396483 hasConcept C520434653 @default.
- W3022396483 hasConcept C525849907 @default.
- W3022396483 hasConcept C60056205 @default.
- W3022396483 hasConceptScore W3022396483C120665830 @default.
- W3022396483 hasConceptScore W3022396483C121332964 @default.
- W3022396483 hasConceptScore W3022396483C146024833 @default.