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• W3024359547 endingPage "112017" @default.
• W3024359547 startingPage "112017" @default.
• W3024359547 abstract "Pressure sensors that can work over 500 ℃ are widely needed in aerospace and petrochemical fields, while silicon based high temperature pressure sensors are difficult to survive such high temperature. Silicon carbide (SiC) shows better mechanical and electrical properties than silicon, which is a feasible candidate to replace silicon for manufacturing high temperature pressure sensor that can work over 500 ℃. However, because of the ultra-high hardness and excellent chemical inertness of SiC, it is difficult to pattern structures on SiC wafer by common etching methods, especially deep etching. Femtosecond laser (fs-laser) is a practicable tool for SiC micromachining as reported in many literatures, but few of them concerns on SiC deep etching in fabricating high temperature pressure sensor’s sensitive diaphragm. In this paper, blind holes with diameter of 1200 μm and depth of 270 μm were fabricated on a 350 μm-thick 4H-SiC wafer by fs-laser, which forms an 80 μm-thick membrane as sensitive diaphragm for pressure sensor. Experiments were conducted to study shape deviation, machining accuracy, edge morphology, sidewall steepness as well as surface roughness of the machined structure. Testing results show that the size errors of machined blind holes are 2.02 % in diameter and 0.38 % in depth, the sidewall steepness is good with an inclination angle of 1.7°, and surface of the sensitive diaphragm is smooth with an average roughness of 320 nm. However, elliptical shape and over etching happens to the fabricated sensitive diaphragm because of inappropriate laser scanning mode, uneven energy distribution and laser irradiation delay. Generally, research shows that fs-laser micromachining is a feasible method for SiC deep etching in fabricating sensitive diaphragm of high temperature pressure sensor." @default.
• W3024359547 created "2020-05-21" @default.
• W3024359547 creator A5003404584 @default.
• W3024359547 creator A5017189473 @default.
• W3024359547 creator A5083126155 @default.
• W3024359547 date "2020-07-01" @default.
• W3024359547 modified "2023-10-07" @default.
• W3024359547 title "Application of femtosecond laser micromachining in silicon carbide deep etching for fabricating sensitive diaphragm of high temperature pressure sensor" @default.
• W3024359547 cites W1980685023 @default.
• W3024359547 cites W1989378229 @default.
• W3024359547 cites W1992739627 @default.
• W3024359547 cites W1992992181 @default.
• W3024359547 cites W2017095223 @default.
• W3024359547 cites W2035949851 @default.
• W3024359547 cites W2036929091 @default.
• W3024359547 cites W2047617695 @default.
• W3024359547 cites W2047649702 @default.
• W3024359547 cites W2061964192 @default.
• W3024359547 cites W2071805640 @default.
• W3024359547 cites W2089573340 @default.
• W3024359547 cites W2158384555 @default.
• W3024359547 cites W2190760876 @default.
• W3024359547 cites W2360791792 @default.
• W3024359547 cites W2608084296 @default.
• W3024359547 cites W2767672421 @default.
• W3024359547 cites W2793133318 @default.
• W3024359547 cites W2806806324 @default.
• W3024359547 cites W2810062897 @default.
• W3024359547 cites W2810448105 @default.
• W3024359547 cites W2824924836 @default.
• W3024359547 cites W2892516712 @default.
• W3024359547 cites W2907011498 @default.
• W3024359547 cites W2993647412 @default.
• W3024359547 doi "https://doi.org/10.1016/j.sna.2020.112017" @default.
• W3024359547 hasPublicationYear "2020" @default.
• W3024359547 type Work @default.
• W3024359547 sameAs 3024359547 @default.
• W3024359547 citedByCount "25" @default.
• W3024359547 countsByYear W30243595472021 @default.
• W3024359547 countsByYear W30243595472022 @default.
• W3024359547 countsByYear W30243595472023 @default.
• W3024359547 crossrefType "journal-article" @default.
• W3024359547 hasAuthorship W3024359547A5003404584 @default.
• W3024359547 hasAuthorship W3024359547A5017189473 @default.
• W3024359547 hasAuthorship W3024359547A5083126155 @default.
• W3024359547 hasBestOaLocation W30243595471 @default.
• W3024359547 hasConcept C100460472 @default.
• W3024359547 hasConcept C107365816 @default.
• W3024359547 hasConcept C120665830 @default.
• W3024359547 hasConcept C121332964 @default.
• W3024359547 hasConcept C124634506 @default.
• W3024359547 hasConcept C130472188 @default.
• W3024359547 hasConcept C136525101 @default.
• W3024359547 hasConcept C142724271 @default.
• W3024359547 hasConcept C145667562 @default.
• W3024359547 hasConcept C159985019 @default.
• W3024359547 hasConcept C160671074 @default.
• W3024359547 hasConcept C167735695 @default.
• W3024359547 hasConcept C191897082 @default.
• W3024359547 hasConcept C192562407 @default.
• W3024359547 hasConcept C204787440 @default.
• W3024359547 hasConcept C2779227376 @default.
• W3024359547 hasConcept C2780722187 @default.
• W3024359547 hasConcept C33220542 @default.
• W3024359547 hasConcept C37977207 @default.
• W3024359547 hasConcept C49040817 @default.
• W3024359547 hasConcept C520434653 @default.
• W3024359547 hasConcept C523214423 @default.
• W3024359547 hasConcept C544956773 @default.
• W3024359547 hasConcept C71039073 @default.
• W3024359547 hasConcept C71924100 @default.
• W3024359547 hasConceptScore W3024359547C100460472 @default.
• W3024359547 hasConceptScore W3024359547C107365816 @default.
• W3024359547 hasConceptScore W3024359547C120665830 @default.
• W3024359547 hasConceptScore W3024359547C121332964 @default.
• W3024359547 hasConceptScore W3024359547C124634506 @default.
• W3024359547 hasConceptScore W3024359547C130472188 @default.
• W3024359547 hasConceptScore W3024359547C136525101 @default.
• W3024359547 hasConceptScore W3024359547C142724271 @default.
• W3024359547 hasConceptScore W3024359547C145667562 @default.
• W3024359547 hasConceptScore W3024359547C159985019 @default.
• W3024359547 hasConceptScore W3024359547C160671074 @default.
• W3024359547 hasConceptScore W3024359547C167735695 @default.
• W3024359547 hasConceptScore W3024359547C191897082 @default.
• W3024359547 hasConceptScore W3024359547C192562407 @default.
• W3024359547 hasConceptScore W3024359547C204787440 @default.
• W3024359547 hasConceptScore W3024359547C2779227376 @default.
• W3024359547 hasConceptScore W3024359547C2780722187 @default.
• W3024359547 hasConceptScore W3024359547C33220542 @default.
• W3024359547 hasConceptScore W3024359547C37977207 @default.
• W3024359547 hasConceptScore W3024359547C49040817 @default.
• W3024359547 hasConceptScore W3024359547C520434653 @default.
• W3024359547 hasConceptScore W3024359547C523214423 @default.
• W3024359547 hasConceptScore W3024359547C544956773 @default.
• W3024359547 hasConceptScore W3024359547C71039073 @default.
• W3024359547 hasConceptScore W3024359547C71924100 @default.
• W3024359547 hasFunder F4320321001 @default.
• W3024359547 hasFunder F4320321543 @default.

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