Matches in SemOpenAlex for { <https://semopenalex.org/work/W3024455586> ?p ?o ?g. }
- W3024455586 endingPage "095009" @default.
- W3024455586 startingPage "095009" @default.
- W3024455586 abstract "The drift phenomenon of closed-loop capacitive silicon-based micro accelerometers has been hidering their application in the precise and rapid industrial positioning areas which highly requires a good dynamic performance. This paper, through the theoretical methods and experiments, has invesatigated systematically the underlying mechanism of such a phenomenon. The possible causes of drift, including thermal effects, dynamic response, capacitor charging and dielectric charging appearing in current literature, were considered by the specific tests. As a result, the first three factors were ruled out from the causes of drift by both theoretical derivation and experimental observation, and only the dielectric charging was identified as the most plausible contributor to the drift. The movement of charges in SiOx on electrodes and glass substrate formed an additioal electrostatic field to disturb the system balance and result in the variation of accelerometer output. The proposed material analysis and shielding tests demonstrated that the drift phenomenon of more than 60% tested accelerometers can be explained by the charging effect of dielectric materials while the remaining sensors require further tests and more complicated models to address this drift. The conclusions proposed in this paper show a meaningful guideline to improve the accelerometer performances in order to meet the demand of high accuracy industrial applications." @default.
- W3024455586 created "2020-05-21" @default.
- W3024455586 creator A5026463048 @default.
- W3024455586 creator A5027475930 @default.
- W3024455586 creator A5033112541 @default.
- W3024455586 creator A5052992015 @default.
- W3024455586 creator A5061418473 @default.
- W3024455586 creator A5065929644 @default.
- W3024455586 creator A5079338411 @default.
- W3024455586 date "2020-06-26" @default.
- W3024455586 modified "2023-09-29" @default.
- W3024455586 title "Investigation of drift phenomena in closed-loop capacitive micro accelerometers" @default.
- W3024455586 cites W1576193274 @default.
- W3024455586 cites W1590214609 @default.
- W3024455586 cites W1931773975 @default.
- W3024455586 cites W1964648988 @default.
- W3024455586 cites W1969274169 @default.
- W3024455586 cites W1973703148 @default.
- W3024455586 cites W1980285457 @default.
- W3024455586 cites W2014096925 @default.
- W3024455586 cites W2017887742 @default.
- W3024455586 cites W2022789656 @default.
- W3024455586 cites W2028926606 @default.
- W3024455586 cites W2035149372 @default.
- W3024455586 cites W2035179658 @default.
- W3024455586 cites W2049795434 @default.
- W3024455586 cites W2061577688 @default.
- W3024455586 cites W2064887432 @default.
- W3024455586 cites W2075198545 @default.
- W3024455586 cites W2080289435 @default.
- W3024455586 cites W2090196917 @default.
- W3024455586 cites W2093111655 @default.
- W3024455586 cites W2096322288 @default.
- W3024455586 cites W2099368553 @default.
- W3024455586 cites W2099525122 @default.
- W3024455586 cites W2099813566 @default.
- W3024455586 cites W2100214208 @default.
- W3024455586 cites W2102785131 @default.
- W3024455586 cites W2103319925 @default.
- W3024455586 cites W2109137811 @default.
- W3024455586 cites W2122289593 @default.
- W3024455586 cites W2155340892 @default.
- W3024455586 cites W2156576069 @default.
- W3024455586 cites W2156691787 @default.
- W3024455586 cites W2157006816 @default.
- W3024455586 cites W2165312484 @default.
- W3024455586 cites W2166486841 @default.
- W3024455586 cites W2167342870 @default.
- W3024455586 cites W2168674688 @default.
- W3024455586 cites W2219598583 @default.
- W3024455586 cites W2287530299 @default.
- W3024455586 cites W2290903912 @default.
- W3024455586 cites W2319088839 @default.
- W3024455586 cites W2321467977 @default.
- W3024455586 cites W2518832703 @default.
- W3024455586 cites W2547537790 @default.
- W3024455586 cites W2672556303 @default.
- W3024455586 cites W2793992764 @default.
- W3024455586 cites W2794273988 @default.
- W3024455586 cites W2929723604 @default.
- W3024455586 cites W2980682111 @default.
- W3024455586 cites W3102041699 @default.
- W3024455586 cites W2060430792 @default.
- W3024455586 doi "https://doi.org/10.1088/1361-6439/ab92eb" @default.
- W3024455586 hasPublicationYear "2020" @default.
- W3024455586 type Work @default.
- W3024455586 sameAs 3024455586 @default.
- W3024455586 citedByCount "2" @default.
- W3024455586 countsByYear W30244555862021 @default.
- W3024455586 crossrefType "journal-article" @default.
- W3024455586 hasAuthorship W3024455586A5026463048 @default.
- W3024455586 hasAuthorship W3024455586A5027475930 @default.
- W3024455586 hasAuthorship W3024455586A5033112541 @default.
- W3024455586 hasAuthorship W3024455586A5052992015 @default.
- W3024455586 hasAuthorship W3024455586A5061418473 @default.
- W3024455586 hasAuthorship W3024455586A5065929644 @default.
- W3024455586 hasAuthorship W3024455586A5079338411 @default.
- W3024455586 hasConcept C114614502 @default.
- W3024455586 hasConcept C119599485 @default.
- W3024455586 hasConcept C121332964 @default.
- W3024455586 hasConcept C127413603 @default.
- W3024455586 hasConcept C133731056 @default.
- W3024455586 hasConcept C154945302 @default.
- W3024455586 hasConcept C184670325 @default.
- W3024455586 hasConcept C192562407 @default.
- W3024455586 hasConcept C206755178 @default.
- W3024455586 hasConcept C24326235 @default.
- W3024455586 hasConcept C24890656 @default.
- W3024455586 hasConcept C2775924081 @default.
- W3024455586 hasConcept C3019251811 @default.
- W3024455586 hasConcept C33923547 @default.
- W3024455586 hasConcept C41008148 @default.
- W3024455586 hasConcept C47446073 @default.
- W3024455586 hasConcept C62520636 @default.
- W3024455586 hasConcept C78519656 @default.
- W3024455586 hasConcept C89805583 @default.
- W3024455586 hasConceptScore W3024455586C114614502 @default.
- W3024455586 hasConceptScore W3024455586C119599485 @default.