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- W3024561266 abstract "This paper reports a newly developed chip-level micro-electromechanical system (MEMS) accelerometer for tilt sensing based on differential array area-change capacitive displacement transducer and through-silicon-wafer etching process. The proposed MEMS accelerometer consists of a silicon-based acceleration-sensitive spring-mass structure, a upper glass cover plate and an universal capacitive readout application specific integrated circuit (ASIC) die, which is used to apply differential driving signals and pickup capacitance change due to area-variation under in-plane motion. The MEMS accelerometer has a linear measurement range of ±30° with a scale factor of 33.6 mV/°. The tilt measurement resolution of the MEMS accelerometer is evaluated by the modified Allan deviation with the results showing that an angle resolution of 0.003° at an integral time of 3 seconds. Compared with the commercial MEMS tilt sensors, the proposed MEMS accelerometer in this work has a larger full measurement range and a larger bandwidth but a little bit poor linearity. Hence, it is believed that the proposed chip-level MEMS accelerometer is promising to be a high-resolution tilt sensor with a lower power consumption and smaller volume." @default.
- W3024561266 created "2020-05-21" @default.
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- W3024561266 date "2020-03-01" @default.
- W3024561266 modified "2023-10-16" @default.
- W3024561266 title "A High-resolution Area-change-based Capacitive MEMS Accelerometer for Tilt Sensing" @default.
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- W3024561266 doi "https://doi.org/10.1109/inertial48129.2020.9090016" @default.
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