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• W3025067701 abstract "Cobalt is a potential candidate for replacing copper for interconnects and has been applied in the trenches and vias in the semiconductor industry. A non-oxidizing reactant is required in plasma-en..." @default.
• W3025067701 created "2020-05-21" @default.
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• W3025067701 date "2020-05-15" @default.
• W3025067701 modified "2023-09-24" @default.
• W3025067701 title "Reaction Mechanism of the Metal Precursor Pulse in Plasma-Enhanced Atomic Layer Deposition of Cobalt and the Role of Surface Facets" @default.
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• W3025067701 doi "https://doi.org/10.1021/acs.jpcc.0c02976" @default.
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