Matches in SemOpenAlex for { <https://semopenalex.org/work/W3025233790> ?p ?o ?g. }
Showing items 1 to 69 of
69
with 100 items per page.
- W3025233790 endingPage "74" @default.
- W3025233790 startingPage "69" @default.
- W3025233790 abstract "A new process is developed for a surface micromachine fabrication with a small sticking problem. Electroplated Ni film is used as maicromachine material and a resist for the image reversal process is used as a sacrificial layer. The processes for the image reversal are carried out before making movable structures. The resist is developed after making movable structures. Movable structures are fixed by small resist columns when the development of the sacrificial layer resist is finished. Finally, the small columns are removed by O2 plasma. Cantilevers with long and wide beam are fabricated by the new process. The cantilever with 1000μm length and 100μm width beam can be fabricated without the sticking problem. The mechanical properties of the electroplated Ni film are examined. It is found that the mechanical properties of the electroplated Ni film is almost same as those of a bulk Ni." @default.
- W3025233790 created "2020-05-21" @default.
- W3025233790 creator A5037119900 @default.
- W3025233790 creator A5089804231 @default.
- W3025233790 date "2004-01-01" @default.
- W3025233790 modified "2023-10-18" @default.
- W3025233790 title "Fabrication Process for Surface Micromachine with Small Sticking Problem by Use of Image Reversal Resist as Sacrificial Layer" @default.
- W3025233790 cites W1976085813 @default.
- W3025233790 cites W2105661592 @default.
- W3025233790 cites W2143653641 @default.
- W3025233790 cites W2160508504 @default.
- W3025233790 doi "https://doi.org/10.1541/ieejsmas.124.69" @default.
- W3025233790 hasPublicationYear "2004" @default.
- W3025233790 type Work @default.
- W3025233790 sameAs 3025233790 @default.
- W3025233790 citedByCount "0" @default.
- W3025233790 crossrefType "journal-article" @default.
- W3025233790 hasAuthorship W3025233790A5037119900 @default.
- W3025233790 hasAuthorship W3025233790A5089804231 @default.
- W3025233790 hasBestOaLocation W30252337901 @default.
- W3025233790 hasConcept C111919701 @default.
- W3025233790 hasConcept C136525101 @default.
- W3025233790 hasConcept C141354745 @default.
- W3025233790 hasConcept C142724271 @default.
- W3025233790 hasConcept C159985019 @default.
- W3025233790 hasConcept C171250308 @default.
- W3025233790 hasConcept C192562407 @default.
- W3025233790 hasConcept C204787440 @default.
- W3025233790 hasConcept C2779227376 @default.
- W3025233790 hasConcept C41008148 @default.
- W3025233790 hasConcept C51807945 @default.
- W3025233790 hasConcept C53524968 @default.
- W3025233790 hasConcept C71924100 @default.
- W3025233790 hasConcept C98045186 @default.
- W3025233790 hasConceptScore W3025233790C111919701 @default.
- W3025233790 hasConceptScore W3025233790C136525101 @default.
- W3025233790 hasConceptScore W3025233790C141354745 @default.
- W3025233790 hasConceptScore W3025233790C142724271 @default.
- W3025233790 hasConceptScore W3025233790C159985019 @default.
- W3025233790 hasConceptScore W3025233790C171250308 @default.
- W3025233790 hasConceptScore W3025233790C192562407 @default.
- W3025233790 hasConceptScore W3025233790C204787440 @default.
- W3025233790 hasConceptScore W3025233790C2779227376 @default.
- W3025233790 hasConceptScore W3025233790C41008148 @default.
- W3025233790 hasConceptScore W3025233790C51807945 @default.
- W3025233790 hasConceptScore W3025233790C53524968 @default.
- W3025233790 hasConceptScore W3025233790C71924100 @default.
- W3025233790 hasConceptScore W3025233790C98045186 @default.
- W3025233790 hasIssue "3" @default.
- W3025233790 hasLocation W30252337901 @default.
- W3025233790 hasOpenAccess W3025233790 @default.
- W3025233790 hasPrimaryLocation W30252337901 @default.
- W3025233790 hasRelatedWork W1970711428 @default.
- W3025233790 hasRelatedWork W2045852577 @default.
- W3025233790 hasRelatedWork W2048457935 @default.
- W3025233790 hasRelatedWork W2066018626 @default.
- W3025233790 hasRelatedWork W2095810733 @default.
- W3025233790 hasRelatedWork W2102505814 @default.
- W3025233790 hasRelatedWork W2126728467 @default.
- W3025233790 hasRelatedWork W2767051672 @default.
- W3025233790 hasRelatedWork W2890402440 @default.
- W3025233790 hasRelatedWork W3123435300 @default.
- W3025233790 hasVolume "124" @default.
- W3025233790 isParatext "false" @default.
- W3025233790 isRetracted "false" @default.
- W3025233790 magId "3025233790" @default.
- W3025233790 workType "article" @default.