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- W3025446423 abstract "An in-plane and out-of-plane 2-axis resonator is required for a roll/pitch rate integrating gyroscope (RIG), which is much more challenging in design and fabrication compared with an in-plane 2-axis resonator used in a yaw RIG. In this study, we propose a dynamically balanced out-of-plane resonator to increase the out-of-plane quality factor (Q-factor). A balanced dual-mass structure is designed to reduce the torque applied to the supporting substrate, and thus increase the Q-factor of the out-of-plane mode. Design optimization for frequency matching, reducing mechanical deformation and increasing Q-factor through finite element method (FEM) simulation has been demonstrated. Manufacturing method of the device employing Au-Au thermo-compression bonding has been developed. The fabricated resonator oscillated at around 4380 Hz after remove by using an externally stacked piezoelectric actuator and laser Doppler vibrometer (LDV)." @default.
- W3025446423 created "2020-05-21" @default.
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- W3025446423 date "2020-03-01" @default.
- W3025446423 modified "2023-10-16" @default.
- W3025446423 title "Roll/Pitch Rate Integrating MEMS Gyroscope Using Dynamically Balanced Dual-Mass Resonator" @default.
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- W3025446423 doi "https://doi.org/10.1109/inertial48129.2020.9090078" @default.
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