FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3025654312> ?p ?o ?g. }

• W3025654312 endingPage "7759" @default.
• W3025654312 startingPage "7749" @default.
• W3025654312 abstract "With the rapid development in semiconductor technology, multi-million transistors are integrated on a System-on-Chip (SoC) to realize the complete functionality of a system. Due to rapid advancement in the field of VLSI technology – with the dimensions shrinking to 30 nm or less, the need for better understanding and proper simulation and optimization of fabrication process steps has become absolutely essential. This requires powerful simulators for various technological steps. The currently available simulators are all stand-alone, integrate all the processing steps and hence are very complicated and exorbitantly expensive. The research and development in the area of process technology, especially in academic environment, does not often require integrated tools. Instead process simulators for unit processing are enough. Powerful computational softwares like Matlab are quite common and available in almost every academic/industrial research and development environment. The use of vast potential of MATLAB can therefore be utilized to develop more advanced and low cost process simulators. An attempt has therefore been made to successfully develop a unit process simulator for ion implantation through composite material used in today’s very large scale integration (VLSI) technology. Key words: Very large scale integration (VLSI) technology, simulation, doping, ion-implantation, MATLAB." @default.
• W3025654312 created "2020-05-21" @default.
• W3025654312 creator A5025329363 @default.
• W3025654312 creator A5030452139 @default.
• W3025654312 date "2011-12-16" @default.
• W3025654312 modified "2023-09-27" @default.
• W3025654312 title "A unit process simulator for ion implantation through composite material using MATLAB" @default.
• W3025654312 cites W1983892185 @default.
• W3025654312 cites W1986172038 @default.
• W3025654312 cites W1990164200 @default.
• W3025654312 cites W1997093713 @default.
• W3025654312 cites W1998870860 @default.
• W3025654312 cites W2004358971 @default.
• W3025654312 cites W2007058414 @default.
• W3025654312 cites W2018259340 @default.
• W3025654312 cites W2019134065 @default.
• W3025654312 cites W2029563449 @default.
• W3025654312 cites W2034562243 @default.
• W3025654312 cites W2038173448 @default.
• W3025654312 cites W2047736597 @default.
• W3025654312 cites W2051678203 @default.
• W3025654312 cites W2071364756 @default.
• W3025654312 cites W2072469735 @default.
• W3025654312 cites W2073997087 @default.
• W3025654312 cites W2076377444 @default.
• W3025654312 cites W2081629197 @default.
• W3025654312 cites W2089963922 @default.
• W3025654312 cites W2092718258 @default.
• W3025654312 cites W2116404586 @default.
• W3025654312 cites W2125703077 @default.
• W3025654312 cites W2125864659 @default.
• W3025654312 cites W2127376866 @default.
• W3025654312 cites W2135901990 @default.
• W3025654312 cites W2146039219 @default.
• W3025654312 cites W2151786685 @default.
• W3025654312 cites W2160076638 @default.
• W3025654312 cites W2161623002 @default.
• W3025654312 cites W2165905836 @default.
• W3025654312 cites W2166810606 @default.
• W3025654312 cites W2316101947 @default.
• W3025654312 cites W2741440843 @default.
• W3025654312 cites W2998798454 @default.
• W3025654312 cites W3005980712 @default.
• W3025654312 cites W3158931398 @default.
• W3025654312 cites W3164035397 @default.
• W3025654312 doi "https://doi.org/10.5897/ijps11.1237" @default.
• W3025654312 hasPublicationYear "2011" @default.
• W3025654312 type Work @default.
• W3025654312 sameAs 3025654312 @default.
• W3025654312 citedByCount "0" @default.
• W3025654312 crossrefType "journal-article" @default.
• W3025654312 hasAuthorship W3025654312A5025329363 @default.
• W3025654312 hasAuthorship W3025654312A5030452139 @default.
• W3025654312 hasConcept C111919701 @default.
• W3025654312 hasConcept C119599485 @default.
• W3025654312 hasConcept C121332964 @default.
• W3025654312 hasConcept C127413603 @default.
• W3025654312 hasConcept C14580979 @default.
• W3025654312 hasConcept C149635348 @default.
• W3025654312 hasConcept C160671074 @default.
• W3025654312 hasConcept C189575605 @default.
• W3025654312 hasConcept C201995342 @default.
• W3025654312 hasConcept C26517878 @default.
• W3025654312 hasConcept C2778755073 @default.
• W3025654312 hasConcept C2780365114 @default.
• W3025654312 hasConcept C41008148 @default.
• W3025654312 hasConcept C44154836 @default.
• W3025654312 hasConcept C62520636 @default.
• W3025654312 hasConcept C66018809 @default.
• W3025654312 hasConcept C98045186 @default.
• W3025654312 hasConceptScore W3025654312C111919701 @default.
• W3025654312 hasConceptScore W3025654312C119599485 @default.
• W3025654312 hasConceptScore W3025654312C121332964 @default.
• W3025654312 hasConceptScore W3025654312C127413603 @default.
• W3025654312 hasConceptScore W3025654312C14580979 @default.
• W3025654312 hasConceptScore W3025654312C149635348 @default.
• W3025654312 hasConceptScore W3025654312C160671074 @default.
• W3025654312 hasConceptScore W3025654312C189575605 @default.
• W3025654312 hasConceptScore W3025654312C201995342 @default.
• W3025654312 hasConceptScore W3025654312C26517878 @default.
• W3025654312 hasConceptScore W3025654312C2778755073 @default.
• W3025654312 hasConceptScore W3025654312C2780365114 @default.
• W3025654312 hasConceptScore W3025654312C41008148 @default.
• W3025654312 hasConceptScore W3025654312C44154836 @default.
• W3025654312 hasConceptScore W3025654312C62520636 @default.
• W3025654312 hasConceptScore W3025654312C66018809 @default.
• W3025654312 hasConceptScore W3025654312C98045186 @default.
• W3025654312 hasIssue "34" @default.
• W3025654312 hasLocation W30256543121 @default.
• W3025654312 hasOpenAccess W3025654312 @default.
• W3025654312 hasPrimaryLocation W30256543121 @default.
• W3025654312 hasRelatedWork W131298288 @default.
• W3025654312 hasRelatedWork W1528724172 @default.
• W3025654312 hasRelatedWork W1570491412 @default.
• W3025654312 hasRelatedWork W1646749627 @default.
• W3025654312 hasRelatedWork W167801640 @default.
• W3025654312 hasRelatedWork W1990885576 @default.
• W3025654312 hasRelatedWork W1997290240 @default.

• next