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- W3026629042 endingPage "80" @default.
- W3026629042 startingPage "77" @default.
- W3026629042 abstract "Problems of etching process, related with MOS transistors separation in SOS technologys was researched. Wet Etching provide a higher degree of selectivity than dry etching techniques. In isotropic etching materials are removed uniformly from all directions. A vertical profile can be easily made using anisotropic etching and it solves the problem of lateral etching. Using dry etching it is much easier to start and stop than simple immersion wet etching and less lateral encroachment is achieved. The main avantage of ion milling is directionality. That’s why less lateral encroachment during region formation could be achieved using ion milling according to wet and dry etching process simulation results. Ill. 8, bibl. 6 (in English; summaries in English, Russian and Lithuanian)." @default.
- W3026629042 created "2020-05-29" @default.
- W3026629042 creator A5067794024 @default.
- W3026629042 creator A5089758359 @default.
- W3026629042 date "2008-07-22" @default.
- W3026629042 modified "2023-09-26" @default.
- W3026629042 title "Investigation of Etching Process in Nano Structures" @default.
- W3026629042 cites W1536847286 @default.
- W3026629042 cites W1967216216 @default.
- W3026629042 hasPublicationYear "2008" @default.
- W3026629042 type Work @default.
- W3026629042 sameAs 3026629042 @default.
- W3026629042 citedByCount "3" @default.
- W3026629042 countsByYear W30266290422020 @default.
- W3026629042 crossrefType "journal-article" @default.
- W3026629042 hasAuthorship W3026629042A5067794024 @default.
- W3026629042 hasAuthorship W3026629042A5089758359 @default.
- W3026629042 hasConcept C100460472 @default.
- W3026629042 hasConcept C120665830 @default.
- W3026629042 hasConcept C121332964 @default.
- W3026629042 hasConcept C1291036 @default.
- W3026629042 hasConcept C130472188 @default.
- W3026629042 hasConcept C159985019 @default.
- W3026629042 hasConcept C171250308 @default.
- W3026629042 hasConcept C191897082 @default.
- W3026629042 hasConcept C192562407 @default.
- W3026629042 hasConcept C2779227376 @default.
- W3026629042 hasConcept C2780357685 @default.
- W3026629042 hasConcept C33220542 @default.
- W3026629042 hasConcept C49040817 @default.
- W3026629042 hasConcept C85725439 @default.
- W3026629042 hasConceptScore W3026629042C100460472 @default.
- W3026629042 hasConceptScore W3026629042C120665830 @default.
- W3026629042 hasConceptScore W3026629042C121332964 @default.
- W3026629042 hasConceptScore W3026629042C1291036 @default.
- W3026629042 hasConceptScore W3026629042C130472188 @default.
- W3026629042 hasConceptScore W3026629042C159985019 @default.
- W3026629042 hasConceptScore W3026629042C171250308 @default.
- W3026629042 hasConceptScore W3026629042C191897082 @default.
- W3026629042 hasConceptScore W3026629042C192562407 @default.
- W3026629042 hasConceptScore W3026629042C2779227376 @default.
- W3026629042 hasConceptScore W3026629042C2780357685 @default.
- W3026629042 hasConceptScore W3026629042C33220542 @default.
- W3026629042 hasConceptScore W3026629042C49040817 @default.
- W3026629042 hasConceptScore W3026629042C85725439 @default.
- W3026629042 hasIssue "6" @default.
- W3026629042 hasLocation W30266290421 @default.
- W3026629042 hasOpenAccess W3026629042 @default.
- W3026629042 hasPrimaryLocation W30266290421 @default.
- W3026629042 hasRelatedWork W2238069398 @default.
- W3026629042 hasRelatedWork W2377694526 @default.
- W3026629042 hasRelatedWork W2799230431 @default.
- W3026629042 hasRelatedWork W2769264220 @default.
- W3026629042 hasRelatedWork W2823682807 @default.
- W3026629042 hasRelatedWork W2824678672 @default.
- W3026629042 hasRelatedWork W2825166310 @default.
- W3026629042 hasRelatedWork W2826211027 @default.
- W3026629042 hasRelatedWork W2832221646 @default.
- W3026629042 hasRelatedWork W2840970493 @default.
- W3026629042 hasRelatedWork W2844538899 @default.
- W3026629042 hasRelatedWork W2866378413 @default.
- W3026629042 hasRelatedWork W2873879876 @default.
- W3026629042 hasRelatedWork W2876217797 @default.
- W3026629042 hasRelatedWork W2879986870 @default.
- W3026629042 hasRelatedWork W2968913484 @default.
- W3026629042 hasRelatedWork W3142146836 @default.
- W3026629042 hasRelatedWork W3142438563 @default.
- W3026629042 hasRelatedWork W3144799716 @default.
- W3026629042 hasRelatedWork W3149289976 @default.
- W3026629042 hasVolume "86" @default.
- W3026629042 isParatext "false" @default.
- W3026629042 isRetracted "false" @default.
- W3026629042 magId "3026629042" @default.
- W3026629042 workType "article" @default.