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• W3028584164 endingPage "138099" @default.
• W3028584164 startingPage "138099" @default.
• W3028584164 abstract "• A high quality CaZrO 3 thin film was prepared by radio frequency magnetron sputtering. • Higher substrate temperature helps the formation of CaZrO 3 . • The Raman spectrum of CaZrO 3 thin films was reported. • The permittivity of CaZrO 3 thin films is close to its bulk form. Crystalline CaZrO 3 thin films were deposited on Pt(111)/Ti/SiO 2 /Si substrate at different temperatures from 450 °C to 550 °C by using radio frequency (RF) magnetron sputtering. The thin films were systematically characterized by X-ray diffraction, Raman scattering specrtoscopy, scanning electron microscopy and atomic force microscopy. The dielectric and leakage behavior of the thin films were also investigated experimentally. The results showed that the growth temperature is the critical factor for the in-situ grown CaZrO 3 thin films by RF magnetron sputtering. The growth temperature should be higher than 500 °C to obtain the perovskite CaZrO 3 main phase thin film. A pronounced texture of high purity perovskite CaZrO 3 thin films could be achieved in-situ at 550 °C. The perovskite CaZrO 3 thin films grown at 550 °C exhibited high-quality performance: dielectric constant ~ 28 at 1 MHz which is close to the reported value of its bulk form, dielectric loss ~ 0.0008 at 1 MHz, leakage current density ~ 6.27 × 10 −7 A/cm 2 (40 V or 1.24 MV/cm) at room temperature." @default.
• W3028584164 created "2020-05-29" @default.
• W3028584164 creator A5006456906 @default.
• W3028584164 creator A5009951694 @default.
• W3028584164 creator A5013016251 @default.
• W3028584164 creator A5023237353 @default.
• W3028584164 creator A5062634434 @default.
• W3028584164 creator A5091820672 @default.
• W3028584164 date "2020-08-01" @default.
• W3028584164 modified "2023-09-30" @default.
• W3028584164 title "Effect of the growth temperature on the composition and dielectric properties of CaZrO3 thin film by radio frequency magnetron sputtering" @default.
• W3028584164 cites W1656883854 @default.
• W3028584164 cites W1947025758 @default.
• W3028584164 cites W1984210590 @default.
• W3028584164 cites W1984934422 @default.
• W3028584164 cites W1997115329 @default.
• W3028584164 cites W1998890343 @default.
• W3028584164 cites W2014529894 @default.
• W3028584164 cites W2020361375 @default.
• W3028584164 cites W2025658335 @default.
• W3028584164 cites W2047189518 @default.
• W3028584164 cites W2059018374 @default.
• W3028584164 cites W2062872918 @default.
• W3028584164 cites W2065548045 @default.
• W3028584164 cites W2077320090 @default.
• W3028584164 cites W2094326087 @default.
• W3028584164 cites W2098107502 @default.
• W3028584164 cites W2121291037 @default.
• W3028584164 cites W2149346653 @default.
• W3028584164 cites W2885230146 @default.
• W3028584164 doi "https://doi.org/10.1016/j.tsf.2020.138099" @default.
• W3028584164 hasPublicationYear "2020" @default.
• W3028584164 type Work @default.
• W3028584164 sameAs 3028584164 @default.
• W3028584164 citedByCount "4" @default.
• W3028584164 countsByYear W30285841642021 @default.
• W3028584164 countsByYear W30285841642023 @default.
• W3028584164 crossrefType "journal-article" @default.
• W3028584164 hasAuthorship W3028584164A5006456906 @default.
• W3028584164 hasAuthorship W3028584164A5009951694 @default.
• W3028584164 hasAuthorship W3028584164A5013016251 @default.
• W3028584164 hasAuthorship W3028584164A5023237353 @default.
• W3028584164 hasAuthorship W3028584164A5062634434 @default.
• W3028584164 hasAuthorship W3028584164A5091820672 @default.
• W3028584164 hasConcept C111368507 @default.
• W3028584164 hasConcept C113196181 @default.
• W3028584164 hasConcept C120665830 @default.
• W3028584164 hasConcept C121332964 @default.
• W3028584164 hasConcept C123408415 @default.
• W3028584164 hasConcept C127313418 @default.
• W3028584164 hasConcept C133386390 @default.
• W3028584164 hasConcept C155011858 @default.
• W3028584164 hasConcept C171250308 @default.
• W3028584164 hasConcept C185592680 @default.
• W3028584164 hasConcept C19067145 @default.
• W3028584164 hasConcept C192562407 @default.
• W3028584164 hasConcept C199289684 @default.
• W3028584164 hasConcept C22423302 @default.
• W3028584164 hasConcept C2777289219 @default.
• W3028584164 hasConcept C40003534 @default.
• W3028584164 hasConcept C43617362 @default.
• W3028584164 hasConcept C49040817 @default.
• W3028584164 hasConcept C61427134 @default.
• W3028584164 hasConcept C8010536 @default.
• W3028584164 hasConceptScore W3028584164C111368507 @default.
• W3028584164 hasConceptScore W3028584164C113196181 @default.
• W3028584164 hasConceptScore W3028584164C120665830 @default.
• W3028584164 hasConceptScore W3028584164C121332964 @default.
• W3028584164 hasConceptScore W3028584164C123408415 @default.
• W3028584164 hasConceptScore W3028584164C127313418 @default.
• W3028584164 hasConceptScore W3028584164C133386390 @default.
• W3028584164 hasConceptScore W3028584164C155011858 @default.
• W3028584164 hasConceptScore W3028584164C171250308 @default.
• W3028584164 hasConceptScore W3028584164C185592680 @default.
• W3028584164 hasConceptScore W3028584164C19067145 @default.
• W3028584164 hasConceptScore W3028584164C192562407 @default.
• W3028584164 hasConceptScore W3028584164C199289684 @default.
• W3028584164 hasConceptScore W3028584164C22423302 @default.
• W3028584164 hasConceptScore W3028584164C2777289219 @default.
• W3028584164 hasConceptScore W3028584164C40003534 @default.
• W3028584164 hasConceptScore W3028584164C43617362 @default.
• W3028584164 hasConceptScore W3028584164C49040817 @default.
• W3028584164 hasConceptScore W3028584164C61427134 @default.
• W3028584164 hasConceptScore W3028584164C8010536 @default.
• W3028584164 hasFunder F4320321001 @default.
• W3028584164 hasLocation W30285841641 @default.
• W3028584164 hasOpenAccess W3028584164 @default.
• W3028584164 hasPrimaryLocation W30285841641 @default.
• W3028584164 hasRelatedWork W1968373997 @default.
• W3028584164 hasRelatedWork W2002900002 @default.
• W3028584164 hasRelatedWork W2069926163 @default.
• W3028584164 hasRelatedWork W2086744665 @default.
• W3028584164 hasRelatedWork W2182889143 @default.
• W3028584164 hasRelatedWork W2373012329 @default.
• W3028584164 hasRelatedWork W2526521535 @default.
• W3028584164 hasRelatedWork W3014081881 @default.
• W3028584164 hasRelatedWork W3203458571 @default.
• W3028584164 hasRelatedWork W137487168 @default.

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