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- W3033152415 abstract "A multi-microscopy investigation of a GaN tunnel junction (TJ) grown on an InGaN-based light emitting diode (LED) has been performed. The TJ consists of a heavily Ge-doped n-type GaN layer grown by ammonia-based molecular-beam epitaxy on a heavily Mg-doped p-type GaN thin layer, grown by metalorganic vapor phase epitaxy. A correlation of atom probe tomography, electron holography and secondary ion mass spectrometry has been performed in order to investigate the nm-scale distribution of both Mg and Ge at the TJ. Experimental results reveal that Mg segregates at the TJ interface, and diffuses into the Ge-doped layer. As a result, the dopant concentration and distribution differ significantly from the nominal values. Despite this, electron holography reveals a TJ depletion width of ∼7 nm, in agreement with band diagram simulations using the experimentally determined dopant distribution." @default.
- W3033152415 created "2020-06-12" @default.
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- W3033152415 date "2020-08-28" @default.
- W3033152415 modified "2023-10-18" @default.
- W3033152415 title "Multi-microscopy nanoscale characterization of the doping profile in a hybrid Mg/Ge-doped tunnel junction" @default.
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- W3033152415 doi "https://doi.org/10.1088/1361-6528/ab996c" @default.
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