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- W3033548679 abstract "Abstract : Ellipsometry has been applied to problems in the microelectronics industry from the beginning in the 1960's. More recently spectroscopic ellipsometry has been introduced. In-situ during process ellipsometry offers great promise for monitoring and control of a wide variety of microelectronics processes. This review covers some applications in silicon technology such as oxidation, chemical vapor deposition, etching, interfaces, and new processing techniques such as plasma, ion beam and rapid thermal, in an effort to demonstrate the kinds of crucial microelectronics information and processes that modern ellipsometry can access. The conclusion is that single wavelength ellipsometry along is not sufficient; spectroscopic ellipsometry is required to establish the optimum ellipsometry measurement conditions. The future of ellipsometry in microelectronics is assessed." @default.
- W3033548679 created "2020-06-12" @default.
- W3033548679 creator A5072443001 @default.
- W3033548679 date "1993-05-04" @default.
- W3033548679 modified "2023-09-26" @default.
- W3033548679 title "Applications of spectroscopic ellipsometry to microelectronics" @default.
- W3033548679 hasPublicationYear "1993" @default.
- W3033548679 type Work @default.
- W3033548679 sameAs 3033548679 @default.
- W3033548679 citedByCount "0" @default.
- W3033548679 crossrefType "journal-article" @default.
- W3033548679 hasAuthorship W3033548679A5072443001 @default.
- W3033548679 hasConcept C100460472 @default.
- W3033548679 hasConcept C171250308 @default.
- W3033548679 hasConcept C18293161 @default.
- W3033548679 hasConcept C187937830 @default.
- W3033548679 hasConcept C19067145 @default.
- W3033548679 hasConcept C192562407 @default.
- W3033548679 hasConcept C2779227376 @default.
- W3033548679 hasConcept C49040817 @default.
- W3033548679 hasConceptScore W3033548679C100460472 @default.
- W3033548679 hasConceptScore W3033548679C171250308 @default.
- W3033548679 hasConceptScore W3033548679C18293161 @default.
- W3033548679 hasConceptScore W3033548679C187937830 @default.
- W3033548679 hasConceptScore W3033548679C19067145 @default.
- W3033548679 hasConceptScore W3033548679C192562407 @default.
- W3033548679 hasConceptScore W3033548679C2779227376 @default.
- W3033548679 hasConceptScore W3033548679C49040817 @default.
- W3033548679 hasLocation W30335486791 @default.
- W3033548679 hasOpenAccess W3033548679 @default.
- W3033548679 hasPrimaryLocation W30335486791 @default.
- W3033548679 hasRelatedWork W1519336752 @default.
- W3033548679 hasRelatedWork W1541702593 @default.
- W3033548679 hasRelatedWork W1546924248 @default.
- W3033548679 hasRelatedWork W1918747604 @default.
- W3033548679 hasRelatedWork W1963526912 @default.
- W3033548679 hasRelatedWork W2007601132 @default.
- W3033548679 hasRelatedWork W2008138299 @default.
- W3033548679 hasRelatedWork W2010586966 @default.
- W3033548679 hasRelatedWork W2073407386 @default.
- W3033548679 hasRelatedWork W2084094041 @default.
- W3033548679 hasRelatedWork W2208887955 @default.
- W3033548679 hasRelatedWork W2309929172 @default.
- W3033548679 hasRelatedWork W2320093100 @default.
- W3033548679 hasRelatedWork W2347058898 @default.
- W3033548679 hasRelatedWork W3021404758 @default.
- W3033548679 hasRelatedWork W3035561592 @default.
- W3033548679 hasRelatedWork W3047745820 @default.
- W3033548679 hasRelatedWork W3095386565 @default.
- W3033548679 hasRelatedWork W563070247 @default.
- W3033548679 hasRelatedWork W2470755604 @default.
- W3033548679 isParatext "false" @default.
- W3033548679 isRetracted "false" @default.
- W3033548679 magId "3033548679" @default.
- W3033548679 workType "article" @default.