Matches in SemOpenAlex for { <https://semopenalex.org/work/W3036054872> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W3036054872 endingPage "799" @default.
- W3036054872 startingPage "798" @default.
- W3036054872 abstract "In the interest of obtaining increased integrated circuit device density, a relatively new technology known as selective epitaxial growth (SEG) of silicon is being explored, especially for improved isolation of devices including possible three dimensional (vertical) integration. This technology involves the deposition and selective nucleation and growth of silicon from the vapor phase, seeded by the silicon substrate. The process is “selective” because nucleation and growth occurs on the silicon substrate but is prohibited on the oxide. The epitaxial silicon proceeds to grow upward and laterally over the oxide. Silicon deposition was performed in a horizontal hot-walled low pressure chemical vapor deposition (LPCVD) reactor. A dry thermal oxide was grown on the substrates, patterned, and etched to create seed windows. A 900 °C prebake was performed at a pressure of 6 torr in a hydrogen ambient for a period of 15 minutes, with in some cases, a small concentration (approximately 0.025%) of dichlorosilane (DCS) gas, and deposition was performed at 850 °C through the decomposition of DCS gas: SiH 2 Cl 2 -> Si(s)+ 2HCl(g)." @default.
- W3036054872 created "2020-06-25" @default.
- W3036054872 creator A5013867427 @default.
- W3036054872 creator A5049051391 @default.
- W3036054872 creator A5068269717 @default.
- W3036054872 creator A5080115257 @default.
- W3036054872 date "1993-08-01" @default.
- W3036054872 modified "2023-09-27" @default.
- W3036054872 title "Electron microscopy of defects in silicon-on-insulator structures formed by selective epitaxial growth" @default.
- W3036054872 cites W1992381812 @default.
- W3036054872 cites W2321489699 @default.
- W3036054872 doi "https://doi.org/10.1017/s0424820100149829" @default.
- W3036054872 hasPublicationYear "1993" @default.
- W3036054872 type Work @default.
- W3036054872 sameAs 3036054872 @default.
- W3036054872 citedByCount "0" @default.
- W3036054872 crossrefType "journal-article" @default.
- W3036054872 hasAuthorship W3036054872A5013867427 @default.
- W3036054872 hasAuthorship W3036054872A5049051391 @default.
- W3036054872 hasAuthorship W3036054872A5068269717 @default.
- W3036054872 hasAuthorship W3036054872A5080115257 @default.
- W3036054872 hasConcept C110738630 @default.
- W3036054872 hasConcept C111368507 @default.
- W3036054872 hasConcept C113196181 @default.
- W3036054872 hasConcept C121332964 @default.
- W3036054872 hasConcept C127313418 @default.
- W3036054872 hasConcept C127413603 @default.
- W3036054872 hasConcept C151730666 @default.
- W3036054872 hasConcept C171250308 @default.
- W3036054872 hasConcept C178790620 @default.
- W3036054872 hasConcept C185592680 @default.
- W3036054872 hasConcept C191897082 @default.
- W3036054872 hasConcept C192562407 @default.
- W3036054872 hasConcept C2777289219 @default.
- W3036054872 hasConcept C2779227376 @default.
- W3036054872 hasConcept C2779523567 @default.
- W3036054872 hasConcept C2779851234 @default.
- W3036054872 hasConcept C2816523 @default.
- W3036054872 hasConcept C30646810 @default.
- W3036054872 hasConcept C42360764 @default.
- W3036054872 hasConcept C49040817 @default.
- W3036054872 hasConcept C53143962 @default.
- W3036054872 hasConcept C544956773 @default.
- W3036054872 hasConcept C57410435 @default.
- W3036054872 hasConcept C61048295 @default.
- W3036054872 hasConcept C64297162 @default.
- W3036054872 hasConcept C86803240 @default.
- W3036054872 hasConcept C97355855 @default.
- W3036054872 hasConceptScore W3036054872C110738630 @default.
- W3036054872 hasConceptScore W3036054872C111368507 @default.
- W3036054872 hasConceptScore W3036054872C113196181 @default.
- W3036054872 hasConceptScore W3036054872C121332964 @default.
- W3036054872 hasConceptScore W3036054872C127313418 @default.
- W3036054872 hasConceptScore W3036054872C127413603 @default.
- W3036054872 hasConceptScore W3036054872C151730666 @default.
- W3036054872 hasConceptScore W3036054872C171250308 @default.
- W3036054872 hasConceptScore W3036054872C178790620 @default.
- W3036054872 hasConceptScore W3036054872C185592680 @default.
- W3036054872 hasConceptScore W3036054872C191897082 @default.
- W3036054872 hasConceptScore W3036054872C192562407 @default.
- W3036054872 hasConceptScore W3036054872C2777289219 @default.
- W3036054872 hasConceptScore W3036054872C2779227376 @default.
- W3036054872 hasConceptScore W3036054872C2779523567 @default.
- W3036054872 hasConceptScore W3036054872C2779851234 @default.
- W3036054872 hasConceptScore W3036054872C2816523 @default.
- W3036054872 hasConceptScore W3036054872C30646810 @default.
- W3036054872 hasConceptScore W3036054872C42360764 @default.
- W3036054872 hasConceptScore W3036054872C49040817 @default.
- W3036054872 hasConceptScore W3036054872C53143962 @default.
- W3036054872 hasConceptScore W3036054872C544956773 @default.
- W3036054872 hasConceptScore W3036054872C57410435 @default.
- W3036054872 hasConceptScore W3036054872C61048295 @default.
- W3036054872 hasConceptScore W3036054872C64297162 @default.
- W3036054872 hasConceptScore W3036054872C86803240 @default.
- W3036054872 hasConceptScore W3036054872C97355855 @default.
- W3036054872 hasLocation W30360548721 @default.
- W3036054872 hasOpenAccess W3036054872 @default.
- W3036054872 hasPrimaryLocation W30360548721 @default.
- W3036054872 hasRelatedWork W1643789723 @default.
- W3036054872 hasRelatedWork W1977729739 @default.
- W3036054872 hasRelatedWork W1985855089 @default.
- W3036054872 hasRelatedWork W2000931135 @default.
- W3036054872 hasRelatedWork W2041065845 @default.
- W3036054872 hasRelatedWork W2061052759 @default.
- W3036054872 hasRelatedWork W2068206282 @default.
- W3036054872 hasRelatedWork W2082549154 @default.
- W3036054872 hasRelatedWork W2154780082 @default.
- W3036054872 hasRelatedWork W2951422007 @default.
- W3036054872 hasVolume "51" @default.
- W3036054872 isParatext "false" @default.
- W3036054872 isRetracted "false" @default.
- W3036054872 magId "3036054872" @default.
- W3036054872 workType "article" @default.