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- W3036224545 abstract "A new type of scanning electron microscope (SEM) has been designed to produce nanometre-level high resolution secondary electron images of the surfaces of uncoated non-conducting specimens such as structural ceramics, cement (Fig.1), supported catalyst particles (Fig.2), fine scale metallic features (Fig.3) including radiation damage, and eventually also biological material. Clean low voltage systems also look promising for microanalysis of surface layers e.g. Fig.4. Very useful 5-20nm resolution images of surfaces are obtained with a conventional electron microscope operated at 25-100kV (Figs.2,3) but at these high accelerating voltages the secondary electron yield of most materials is very low, typically < 0.1, and there are therefore severe surface charging problems with non-conducting regions of specimens, the images of which are consequently of poor quality." @default.
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- W3036224545 date "1984-08-01" @default.
- W3036224545 modified "2023-10-14" @default.
- W3036224545 title "High resolution at low voltage: The SEM philosopher's stone?" @default.
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- W3036224545 doi "https://doi.org/10.1017/s0424820100112269" @default.
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