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- W3036335306 endingPage "729" @default.
- W3036335306 startingPage "728" @default.
- W3036335306 abstract "It is well known that metal films evaporated or sputtered in vacuum are not continuous at a thickness of less than several ten nanometers, but show fine particle distributions or have island granularities as thickness increases. Morphorogy of deposited thin films have been one of the major investigation areas in nucleation, crystal growth, crystal surface studies and so on. There is a room for discussions concerning physical properties such as non-ohmic conductivities of the thin metal films in relation to morphorogy. However, almost all micrographs obtained by electron microscopes, both TEMs and SEMs, showing such thin metal films are two dimensional, that is, there is not much information how deposited films are growing on the substrate. Owing to the recent development of a high resolution SEM having a probe size of smaller than 1nm by a combination of highly excited condenser-objective lens and a field emission electron source, three dimensional information for the thin film can be provided as shown in Fig. 1. These specimens are Pt sputter-coated on Si wafers at room temperature with a so-called “magnetron” sputter coater, and then fractured for crosssection study by the HRSEM." @default.
- W3036335306 created "2020-06-25" @default.
- W3036335306 creator A5017430000 @default.
- W3036335306 creator A5025105803 @default.
- W3036335306 creator A5033876870 @default.
- W3036335306 creator A5053442214 @default.
- W3036335306 date "1989-08-06" @default.
- W3036335306 modified "2023-09-25" @default.
- W3036335306 title "Film thickness measurement by a cross-sectional SEM" @default.
- W3036335306 cites W2048850533 @default.
- W3036335306 doi "https://doi.org/10.1017/s042482010015561x" @default.
- W3036335306 hasPublicationYear "1989" @default.
- W3036335306 type Work @default.
- W3036335306 sameAs 3036335306 @default.
- W3036335306 citedByCount "2" @default.
- W3036335306 crossrefType "journal-article" @default.
- W3036335306 hasAuthorship W3036335306A5017430000 @default.
- W3036335306 hasAuthorship W3036335306A5025105803 @default.
- W3036335306 hasAuthorship W3036335306A5033876870 @default.
- W3036335306 hasAuthorship W3036335306A5053442214 @default.
- W3036335306 hasConcept C111368507 @default.
- W3036335306 hasConcept C120665830 @default.
- W3036335306 hasConcept C121332964 @default.
- W3036335306 hasConcept C127313418 @default.
- W3036335306 hasConcept C159985019 @default.
- W3036335306 hasConcept C160671074 @default.
- W3036335306 hasConcept C171250308 @default.
- W3036335306 hasConcept C178790620 @default.
- W3036335306 hasConcept C185592680 @default.
- W3036335306 hasConcept C19067145 @default.
- W3036335306 hasConcept C192562407 @default.
- W3036335306 hasConcept C199360897 @default.
- W3036335306 hasConcept C207114421 @default.
- W3036335306 hasConcept C22423302 @default.
- W3036335306 hasConcept C26771246 @default.
- W3036335306 hasConcept C2777289219 @default.
- W3036335306 hasConcept C2781285689 @default.
- W3036335306 hasConcept C41008148 @default.
- W3036335306 hasConcept C49040817 @default.
- W3036335306 hasConcept C61048295 @default.
- W3036335306 hasConcept C61427134 @default.
- W3036335306 hasConcept C97404965 @default.
- W3036335306 hasConceptScore W3036335306C111368507 @default.
- W3036335306 hasConceptScore W3036335306C120665830 @default.
- W3036335306 hasConceptScore W3036335306C121332964 @default.
- W3036335306 hasConceptScore W3036335306C127313418 @default.
- W3036335306 hasConceptScore W3036335306C159985019 @default.
- W3036335306 hasConceptScore W3036335306C160671074 @default.
- W3036335306 hasConceptScore W3036335306C171250308 @default.
- W3036335306 hasConceptScore W3036335306C178790620 @default.
- W3036335306 hasConceptScore W3036335306C185592680 @default.
- W3036335306 hasConceptScore W3036335306C19067145 @default.
- W3036335306 hasConceptScore W3036335306C192562407 @default.
- W3036335306 hasConceptScore W3036335306C199360897 @default.
- W3036335306 hasConceptScore W3036335306C207114421 @default.
- W3036335306 hasConceptScore W3036335306C22423302 @default.
- W3036335306 hasConceptScore W3036335306C26771246 @default.
- W3036335306 hasConceptScore W3036335306C2777289219 @default.
- W3036335306 hasConceptScore W3036335306C2781285689 @default.
- W3036335306 hasConceptScore W3036335306C41008148 @default.
- W3036335306 hasConceptScore W3036335306C49040817 @default.
- W3036335306 hasConceptScore W3036335306C61048295 @default.
- W3036335306 hasConceptScore W3036335306C61427134 @default.
- W3036335306 hasConceptScore W3036335306C97404965 @default.
- W3036335306 hasLocation W30363353061 @default.
- W3036335306 hasOpenAccess W3036335306 @default.
- W3036335306 hasPrimaryLocation W30363353061 @default.
- W3036335306 hasRelatedWork W1995810423 @default.
- W3036335306 hasRelatedWork W2055535889 @default.
- W3036335306 hasRelatedWork W2073638793 @default.
- W3036335306 hasRelatedWork W2316948141 @default.
- W3036335306 hasRelatedWork W2348598805 @default.
- W3036335306 hasRelatedWork W2373012329 @default.
- W3036335306 hasRelatedWork W2373579184 @default.
- W3036335306 hasRelatedWork W2382780944 @default.
- W3036335306 hasRelatedWork W2526521535 @default.
- W3036335306 hasRelatedWork W2188856160 @default.
- W3036335306 hasVolume "47" @default.
- W3036335306 isParatext "false" @default.
- W3036335306 isRetracted "false" @default.
- W3036335306 magId "3036335306" @default.
- W3036335306 workType "article" @default.