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- W3036355810 endingPage "607" @default.
- W3036355810 startingPage "606" @default.
- W3036355810 abstract "High-dose oxygen implantation into silicon, SIMOX (separation by implantation of oxygen), is a leading technique for producing silicon-on-insulator (SOI) material. Most studies have examined SIMOX prepared with a traditional implanter, which has beam currents of 100 to 400 μA. Since the formation of SIMOX requires a very high dose of oxygen, typically one hundred times larger than the standard dopant implant doses, the process takes many hours. Recently, a high-current implanter has been developed for SIMOX fabrication, which produces a 40 mA beam current. However, the higher current density has not only shortened the implantation time, but also produced features not routinely observed in samples implanted at much lower currents. The study reported here used conventional transmission and high resolution electron microscopy (CTEM,HREM) to characterize microstructure and defects in SIMOX implanted at high currents." @default.
- W3036355810 created "2020-06-25" @default.
- W3036355810 creator A5052528398 @default.
- W3036355810 date "1989-08-06" @default.
- W3036355810 modified "2023-10-17" @default.
- W3036355810 title "Multiply faulted defects in high-current oxygen-implanted silicon-on-insulator" @default.
- W3036355810 cites W2027484652 @default.
- W3036355810 cites W2065181237 @default.
- W3036355810 cites W2068135708 @default.
- W3036355810 cites W2093556933 @default.
- W3036355810 cites W2327061707 @default.
- W3036355810 doi "https://doi.org/10.1017/s0424820100155001" @default.
- W3036355810 hasPublicationYear "1989" @default.
- W3036355810 type Work @default.
- W3036355810 sameAs 3036355810 @default.
- W3036355810 citedByCount "0" @default.
- W3036355810 crossrefType "journal-article" @default.
- W3036355810 hasAuthorship W3036355810A5052528398 @default.
- W3036355810 hasConcept C119599485 @default.
- W3036355810 hasConcept C127413603 @default.
- W3036355810 hasConcept C136525101 @default.
- W3036355810 hasConcept C142724271 @default.
- W3036355810 hasConcept C145148216 @default.
- W3036355810 hasConcept C146088050 @default.
- W3036355810 hasConcept C148043351 @default.
- W3036355810 hasConcept C159985019 @default.
- W3036355810 hasConcept C171250308 @default.
- W3036355810 hasConcept C178790620 @default.
- W3036355810 hasConcept C185592680 @default.
- W3036355810 hasConcept C191952053 @default.
- W3036355810 hasConcept C192562407 @default.
- W3036355810 hasConcept C204787440 @default.
- W3036355810 hasConcept C2779162123 @default.
- W3036355810 hasConcept C41823505 @default.
- W3036355810 hasConcept C49040817 @default.
- W3036355810 hasConcept C53143962 @default.
- W3036355810 hasConcept C540031477 @default.
- W3036355810 hasConcept C544956773 @default.
- W3036355810 hasConcept C57863236 @default.
- W3036355810 hasConcept C71924100 @default.
- W3036355810 hasConcept C87976508 @default.
- W3036355810 hasConceptScore W3036355810C119599485 @default.
- W3036355810 hasConceptScore W3036355810C127413603 @default.
- W3036355810 hasConceptScore W3036355810C136525101 @default.
- W3036355810 hasConceptScore W3036355810C142724271 @default.
- W3036355810 hasConceptScore W3036355810C145148216 @default.
- W3036355810 hasConceptScore W3036355810C146088050 @default.
- W3036355810 hasConceptScore W3036355810C148043351 @default.
- W3036355810 hasConceptScore W3036355810C159985019 @default.
- W3036355810 hasConceptScore W3036355810C171250308 @default.
- W3036355810 hasConceptScore W3036355810C178790620 @default.
- W3036355810 hasConceptScore W3036355810C185592680 @default.
- W3036355810 hasConceptScore W3036355810C191952053 @default.
- W3036355810 hasConceptScore W3036355810C192562407 @default.
- W3036355810 hasConceptScore W3036355810C204787440 @default.
- W3036355810 hasConceptScore W3036355810C2779162123 @default.
- W3036355810 hasConceptScore W3036355810C41823505 @default.
- W3036355810 hasConceptScore W3036355810C49040817 @default.
- W3036355810 hasConceptScore W3036355810C53143962 @default.
- W3036355810 hasConceptScore W3036355810C540031477 @default.
- W3036355810 hasConceptScore W3036355810C544956773 @default.
- W3036355810 hasConceptScore W3036355810C57863236 @default.
- W3036355810 hasConceptScore W3036355810C71924100 @default.
- W3036355810 hasConceptScore W3036355810C87976508 @default.
- W3036355810 hasLocation W30363558101 @default.
- W3036355810 hasOpenAccess W3036355810 @default.
- W3036355810 hasPrimaryLocation W30363558101 @default.
- W3036355810 hasRelatedWork W1966205888 @default.
- W3036355810 hasRelatedWork W2006562100 @default.
- W3036355810 hasRelatedWork W2058418065 @default.
- W3036355810 hasRelatedWork W2325186504 @default.
- W3036355810 hasRelatedWork W2946673320 @default.
- W3036355810 hasRelatedWork W2951208012 @default.
- W3036355810 hasRelatedWork W3152909008 @default.
- W3036355810 hasRelatedWork W3156047245 @default.
- W3036355810 hasRelatedWork W4240768129 @default.
- W3036355810 hasRelatedWork W4327940569 @default.
- W3036355810 hasVolume "47" @default.
- W3036355810 isParatext "false" @default.
- W3036355810 isRetracted "false" @default.
- W3036355810 magId "3036355810" @default.
- W3036355810 workType "article" @default.