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- W3036374375 abstract "Field emission SEMs (FE-SEMs) are becoming popular due to their high resolution needs. In the field of semiconductor product, it is demanded to use the low accelerating voltage FE-SEM to avoid the electron irradiation damage and the electron charging up on samples. However the accelerating voltage of usual SEM with FE-gun is limited until 1 kV, which is not enough small for the present demands, because the virtual source goes far from the tip in lower accelerating voltages. This virtual source position depends on the shape of the electrostatic lens. So, we investigated several types of electrostatic lenses to be applicable to the lower accelerating voltage. In the result, it is found a field emission gun with a conical anode is effectively applied for a wide range of low accelerating voltages. A field emission gun usually consists of a field emission tip (cold cathode) and the Butler type electrostatic lens." @default.
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- W3036374375 date "1988-01-01" @default.
- W3036374375 modified "2023-09-26" @default.
- W3036374375 title "Development of a conical anode Fe-gun for low voltage SEM" @default.
- W3036374375 doi "https://doi.org/10.1017/s0424820100106958" @default.
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