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- W3036561113 abstract "We have developed an electron energy loss spectrometer (H-8020) for a 200kV electron microscope (H-800). (Fig. 1) This spectrometer utilizes a sectorQtype electro-magnet with a radius of 132 mm and a deflection angle of 90°. The magnet allows 3-dimensional beam focus. There is an alignment coil and stigmator built-in at the entrance of the magnet to ensure good resolution. At the outlet of the magnet, there is a pair of electrodes. An RF voltage, which is synchronized with a rockin- amplifier, is applied as a carrier wave across the electrodes. Thus, electron energy loss spectrum is detected in a differentiated form so that back ground noise of the spectrum is eliminated and it permits elemental mapping image of a specified element. In addition, we have incorporated a CRT for monitoring spectrum and such new functions as auto main peak search, auto gain control for improved overall operation. Fig. 2 is an example of energy resolution of aluminum evaporated film. It shows 2eV resolution at 200kV. Fig. 3 is an example of boron nitride (BN). It shows fine structures at the edge of B-K peak." @default.
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- W3036561113 date "1983-08-01" @default.
- W3036561113 modified "2023-10-17" @default.
- W3036561113 title "Development of an electron energy loss spectrometer (H-8020) for 200kV ATEM" @default.
- W3036561113 doi "https://doi.org/10.1017/s0424820100075373" @default.
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