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- W3036638894 abstract "The properties of multilayer thin film materials are strongly influenced by the structure of their interfaces. The numerous applications for these materials motivate electron microscopy studies of cross sectional samples in which the interfaces are observed edge on. High resolution imaging is the most established technique, but other techniques, such as Fresnel fringe method and refraction at interfaces, have also been employed to characterize the structure and abruptness of amorphous/polycrystalline multilayers. The aim of this work is to explore the applicability of shadow images from coherent sources to the studies of multilayers. Coherent interference effects are readily observable in the diffraction plane of a VG HB-5 STEM which is equipped with a cold field emission gun. The shadow image of the studied Si/Mo multilayer is obtained on the detection plane when the specimen is illuminated by a stationary convergent beam. This beam is formed with a very large or no objective aperture. Low magnification images are produced at large values of defocus (Fig. 1a), while for lower defocus the magnification increases and the shadow images become more and more distorted because of the objective lens aberration (Fig. 1b and 1c). In addition to the high sensitivity to the defocus. spherical aberration and probe position, the shadow images also appear to be dependent on the interface abruptness." @default.
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- W3036638894 date "1990-08-01" @default.
- W3036638894 modified "2023-09-25" @default.
- W3036638894 title "Calculations and experimental observations of shadow images from multilayers" @default.
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- W3036638894 doi "https://doi.org/10.1017/s0424820100175338" @default.
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