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- W3036692041 abstract "The 300 kV analytical electron microscope, as compared with the 100 to 200 kV instruments, have excellent features such as the high resolution of TEM images, high P/B ratio of EDS and PEELS, and high spacial resolution in analysis. We hereby report the principal specifications of an ultrahigh sensitivity and ultrahigh resolution field emission type electron microscope, which, capable of giving full play to the above-mentioned features of the 300 kV analytical instrument, allows elemental analysis at the single atomic layer level (nm regions). Its electron gun, simply operated by CPU control, allows emission current to be obtained at the touch of a single button. As the emitter, a W (100)-TF emitter, which can be used simply, stably, and for a long period of time, is employed. After build-up, this emitter can obtain about 10 times the angular current density of the W (310) emitter. Around the emitter are provided three electrodes to make emission current variation and electrostatic lens function independent of each other." @default.
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- W3036692041 date "1993-08-01" @default.
- W3036692041 modified "2023-09-27" @default.
- W3036692041 title "Development of a 300 kV field emission TEM" @default.
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- W3036692041 doi "https://doi.org/10.1017/s0424820100151234" @default.
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