Matches in SemOpenAlex for { <https://semopenalex.org/work/W3036728316> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W3036728316 abstract "Polycrystalline silicon (poly-Si) films have found many applications in integrated circuits, and in actuators and sensors. Important considerations in the processing of these devices are structural stability and repeatable mechanical properties of the films. The texture and stress state of the films depend strongly on the microstructures and morphology of the films. Tensile films, which are preferred to compressive films in devices whose lateral dimensions of clamped structures are not to be restricted by compressive buckling, are characterized by equiaxial grain morphology, while compressive films are characterized by columnar grain growth during deposition. A diamond hexagonal (d.h.) Si structure with lattice parameters of a = 3.8Å and c = 6.28Å was first reported in 1963. More recently, transformation from the diamond cubic (d.c.) Si to the hexagonal phase has been observed in Si under hydrostatic pressure at temperatures between 350 C and 700 C, in heavily ion-implanted silicon, and in as-grown, implanted, and annealed CVD Si thin films, in addition to the known high pressure Si phases." @default.
- W3036728316 created "2020-06-25" @default.
- W3036728316 creator A5070152628 @default.
- W3036728316 date "1991-08-01" @default.
- W3036728316 modified "2023-09-27" @default.
- W3036728316 title "Hexagonal phase in tensile low-pressure CVD poly-Si film" @default.
- W3036728316 cites W1976229637 @default.
- W3036728316 cites W1999092106 @default.
- W3036728316 cites W2001265227 @default.
- W3036728316 cites W2023706703 @default.
- W3036728316 cites W2025322144 @default.
- W3036728316 cites W2047748996 @default.
- W3036728316 cites W2049376342 @default.
- W3036728316 cites W2052558948 @default.
- W3036728316 cites W2058818551 @default.
- W3036728316 cites W2119084493 @default.
- W3036728316 doi "https://doi.org/10.1017/s0424820100088373" @default.
- W3036728316 hasPublicationYear "1991" @default.
- W3036728316 type Work @default.
- W3036728316 sameAs 3036728316 @default.
- W3036728316 citedByCount "0" @default.
- W3036728316 crossrefType "journal-article" @default.
- W3036728316 hasAuthorship W3036728316A5070152628 @default.
- W3036728316 hasConcept C112950240 @default.
- W3036728316 hasConcept C128765274 @default.
- W3036728316 hasConcept C159985019 @default.
- W3036728316 hasConcept C178790620 @default.
- W3036728316 hasConcept C185592680 @default.
- W3036728316 hasConcept C192562407 @default.
- W3036728316 hasConcept C44280652 @default.
- W3036728316 hasConcept C8010536 @default.
- W3036728316 hasConceptScore W3036728316C112950240 @default.
- W3036728316 hasConceptScore W3036728316C128765274 @default.
- W3036728316 hasConceptScore W3036728316C159985019 @default.
- W3036728316 hasConceptScore W3036728316C178790620 @default.
- W3036728316 hasConceptScore W3036728316C185592680 @default.
- W3036728316 hasConceptScore W3036728316C192562407 @default.
- W3036728316 hasConceptScore W3036728316C44280652 @default.
- W3036728316 hasConceptScore W3036728316C8010536 @default.
- W3036728316 hasLocation W30367283161 @default.
- W3036728316 hasOpenAccess W3036728316 @default.
- W3036728316 hasPrimaryLocation W30367283161 @default.
- W3036728316 hasRelatedWork W1987620686 @default.
- W3036728316 hasRelatedWork W2011868363 @default.
- W3036728316 hasRelatedWork W2026736134 @default.
- W3036728316 hasRelatedWork W2032056357 @default.
- W3036728316 hasRelatedWork W2067279266 @default.
- W3036728316 hasRelatedWork W2070246554 @default.
- W3036728316 hasRelatedWork W2166808823 @default.
- W3036728316 hasRelatedWork W2271780234 @default.
- W3036728316 hasRelatedWork W2322504590 @default.
- W3036728316 hasRelatedWork W2335524702 @default.
- W3036728316 hasRelatedWork W2352688482 @default.
- W3036728316 hasRelatedWork W2352931329 @default.
- W3036728316 hasRelatedWork W2356249368 @default.
- W3036728316 hasRelatedWork W2378981139 @default.
- W3036728316 hasRelatedWork W2517581516 @default.
- W3036728316 hasRelatedWork W2568082434 @default.
- W3036728316 hasRelatedWork W3199563267 @default.
- W3036728316 hasRelatedWork W2469856417 @default.
- W3036728316 hasRelatedWork W2515153330 @default.
- W3036728316 hasRelatedWork W3112884892 @default.
- W3036728316 isParatext "false" @default.
- W3036728316 isRetracted "false" @default.
- W3036728316 magId "3036728316" @default.
- W3036728316 workType "article" @default.