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- W3036754966 abstract "By providing higher image contrast and reduced charging artifacts, the low voltage scanning electron microscope (LVSEM) is a valuable tool for surface characterization, of particular importance on nonconductive material such as biological specimens. Several SEM designs optimized for use at low voltage have been proposed. Recently, we have designed a new high resolution LVSEM using a field emission gun. The key problem is to decrease both the spherical and chromatic aberration coefficients by using a magnetic lens of small bore diameters(5mm and 10mm) and a narrow gap (7.5mm) (FIG. 1). In our first design, the magnetic lens is built around the side-entry stage of a Philips 300kV TEM and performs as well as that in the present Hitachi SEM H-900 or H-900S. Its simple design has been chosen for reliability and flexibility in farbrication." @default.
- W3036754966 created "2020-06-25" @default.
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- W3036754966 date "1992-08-01" @default.
- W3036754966 modified "2023-09-27" @default.
- W3036754966 title "Electron-optical design of a high-resolution objective lens for low-voltage Scanning Electron Microscope of biological applications" @default.
- W3036754966 cites W1991363032 @default.
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- W3036754966 doi "https://doi.org/10.1017/s0424820100129383" @default.
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