FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3036804568> ?p ?o ?g. }

• W3036804568 abstract "The advantages of the LV SEM are well known. Recently a lot of interesting results from this field were presented which were obtained thanks to development of field emission guns and to the enourmous progress in the computation techniques in electron optics. One of the simplest arrangements of the LVSEM is shown in Figure 1. The Tesla SEM BS 350 with a field emission gun and the TF-W/100-Zr cathode was used for our experiment. The gun provides 10 −10 A current in the diffraction limited spot (for the angular density 0.20mA sr −1 ). If a potential U sp is applied to the specimen the energy E of the electrons that strike the specimen is E p -eU sp (E p -primary beam energy, e-elementary charge). The produced secondary (SE) and backscattered (BSE) electrons are accelerated towards the semiconductor detector by the electrostatic field and their energy spectrum extends from eUs p to E p . The final energy of the SE and BSE can then be sufficient for achieving a reasonable amplification of the semiconductor detector which is directly proportional to the energy of the electrons that strike the detector. We calculated optical properties for a combination of the electrostatic and magnetic lenses of the basic geometry shown in Figure 1 and for an arrangement with the single polepiece lens shown in Figure 2. We particularly investigated coefficients of the chromatic (C c ) and spherical (C s ) aberrations as functions of the ratio of the primary beam energy to the energy of the electrons that strike the specimen E p /E for some optimum position of the specimen, electropstatic and magnetic field. Our results are shown in Table 1. The coefficients C s and C c do not change with the energy E p or E if the ratio E p /E is maitained the same and aberrations are lower for larger ratios E p /E, so that the influence of the contribution of the electrostatic lens aberrations is negligible for our geometry. For example, if we require a resolution limit r=2nm and an energy of the electrons that strike the specimen E=300eV, it is possible to calculate that the coefficient of the aberrations must be C s <0.21mm and C c <0.14mm for an energy width AE=0.2eV, so that we need the ratio E p /E≥150 for the arrangement shown in Figure 1 (i.e.E p ≥45keV) and E p /E≥33 for the arrangement shown in Figure 2 (i.e.E p ≥10keV).The advantages of the combination of the magnetic lens with the electrostatic cathode lens for the high resolution very low energy electron microscopy are well known . We assume that for the LVSEM only a medium electrostatic field strength is admitted at the specimen surface. Nevertheless, our experimental arrangements should certainly be optimized in the future." @default.
• W3036804568 created "2020-06-25" @default.
• W3036804568 creator A5001253517 @default.
• W3036804568 creator A5005759197 @default.
• W3036804568 date "1990-08-12" @default.
• W3036804568 modified "2023-10-16" @default.
• W3036804568 title "Low-Voltage Scanning Electron Microscope (LVSEM) with a Single-Polepiece Lens" @default.
• W3036804568 cites W1996416437 @default.
• W3036804568 doi "https://doi.org/10.1017/s0424820100180744" @default.
• W3036804568 hasPublicationYear "1990" @default.
• W3036804568 type Work @default.
• W3036804568 sameAs 3036804568 @default.
• W3036804568 citedByCount "0" @default.
• W3036804568 crossrefType "journal-article" @default.
• W3036804568 hasAuthorship W3036804568A5001253517 @default.
• W3036804568 hasAuthorship W3036804568A5005759197 @default.
• W3036804568 hasConcept C120665830 @default.
• W3036804568 hasConcept C121332964 @default.
• W3036804568 hasConcept C135693964 @default.
• W3036804568 hasConcept C15336307 @default.
• W3036804568 hasConcept C178423520 @default.
• W3036804568 hasConcept C192562407 @default.
• W3036804568 hasConcept C193016168 @default.
• W3036804568 hasConcept C26771246 @default.
• W3036804568 hasConcept C49040817 @default.
• W3036804568 hasConcept C67649825 @default.
• W3036804568 hasConcept C93877712 @default.
• W3036804568 hasConceptScore W3036804568C120665830 @default.
• W3036804568 hasConceptScore W3036804568C121332964 @default.
• W3036804568 hasConceptScore W3036804568C135693964 @default.
• W3036804568 hasConceptScore W3036804568C15336307 @default.
• W3036804568 hasConceptScore W3036804568C178423520 @default.
• W3036804568 hasConceptScore W3036804568C192562407 @default.
• W3036804568 hasConceptScore W3036804568C193016168 @default.
• W3036804568 hasConceptScore W3036804568C26771246 @default.
• W3036804568 hasConceptScore W3036804568C49040817 @default.
• W3036804568 hasConceptScore W3036804568C67649825 @default.
• W3036804568 hasConceptScore W3036804568C93877712 @default.
• W3036804568 hasLocation W30368045681 @default.
• W3036804568 hasOpenAccess W3036804568 @default.
• W3036804568 hasPrimaryLocation W30368045681 @default.
• W3036804568 hasRelatedWork W2114029959 @default.
• W3036804568 hasRelatedWork W2155041502 @default.
• W3036804568 hasRelatedWork W2791315506 @default.
• W3036804568 hasRelatedWork W2965397032 @default.
• W3036804568 hasRelatedWork W3013947856 @default.
• W3036804568 hasRelatedWork W3035832927 @default.
• W3036804568 hasRelatedWork W3035871185 @default.
• W3036804568 hasRelatedWork W3036227323 @default.
• W3036804568 hasRelatedWork W3038656254 @default.
• W3036804568 hasRelatedWork W3040574087 @default.
• W3036804568 hasRelatedWork W3090894191 @default.
• W3036804568 hasRelatedWork W2396331662 @default.
• W3036804568 hasRelatedWork W2771023215 @default.
• W3036804568 hasRelatedWork W2781398243 @default.
• W3036804568 hasRelatedWork W2841014965 @default.
• W3036804568 hasRelatedWork W2857680750 @default.
• W3036804568 hasRelatedWork W2861876658 @default.
• W3036804568 hasRelatedWork W2863134201 @default.
• W3036804568 hasRelatedWork W2923673853 @default.
• W3036804568 hasRelatedWork W3090623593 @default.
• W3036804568 isParatext "false" @default.
• W3036804568 isRetracted "false" @default.
• W3036804568 magId "3036804568" @default.
• W3036804568 workType "article" @default.