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- W3036822590 abstract "The implantation of materials with noble gas ions is of particular interest in studying some of the fundamental aspects of the ion implantation process and resultant phenomena because the noble gas ions are immiscible with the matrix and therefore chemical effects are unlikely. Electron diffraction studies have clearly demonstrated that noble gas ions implantated into either metals or ceramics may coalesce to form inclusions. These inclusions may be either solid or fluid and their formation often results in swelling of the matrix. This swelling can be readily apparent on the surface of metallic materials. However, in ceramic materials the extent of this swelling, particular at low ion fluences, can be very small and hence only detectable with surface sensitive topographic probes such as atomic force microscopy (AFM). Polished (00l)-oriented MgO single crystals were implanted with xenon ions using an accelerating voltage of 200 keV at a range of fluences. The specimens were then examined with AFM. The AFM results showed that, even at the lowest fluence, there was measurable roughening of the surface. At a fluence of 1 × 10 17 /cm 2 small blisters were observed. These blisters have diameters of 0.5 - 0.8 μ m and extend to heights of up to 80 nm." @default.
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- W3036822590 date "1995-08-13" @default.
- W3036822590 modified "2023-09-25" @default.
- W3036822590 title "Surface morphology of xenon implanted single crystal magnesium oxide observed by Atomic Force Microscopy" @default.
- W3036822590 cites W1989220181 @default.
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- W3036822590 doi "https://doi.org/10.1017/s0424820100138154" @default.
- W3036822590 hasPublicationYear "1995" @default.
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