Matches in SemOpenAlex for { <https://semopenalex.org/work/W3036974278> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W3036974278 endingPage "713" @default.
- W3036974278 startingPage "712" @default.
- W3036974278 abstract "Recent advances in projection electron lithography have led to the development of a non-imaging mark detection scheme for alignment and registration that uses backscatter electron (BSE) contrast. The detection scheme is referred to as the beamlet method and uses the measured BSE emission to detect the correct alignment condition when the image of a mask mark is scanned over a corresponding wafer mark When applied to a SCALPEL system (i.e. SCattering with Angular Limitation in Projection Electron Lithography) mark detection accuracy of better than 10 nm has been reported. Incident electrons with approximately 100 keV energy will be used in a practical SCALPEL lithography tool. In this study we compare theoretical BSE ratios with quantitative measurements in a prototype SCALPEL machine. From these results we are able to predict the suitability of materials used for conductive links in very large scale integrated (VLSI) circuits. The theory for BSE emission from thin deposited films has been developed from work on thin self supporting films." @default.
- W3036974278 created "2020-06-25" @default.
- W3036974278 creator A5011404203 @default.
- W3036974278 creator A5024734211 @default.
- W3036974278 creator A5035173830 @default.
- W3036974278 creator A5042804916 @default.
- W3036974278 creator A5065814687 @default.
- W3036974278 creator A5066994126 @default.
- W3036974278 creator A5078230417 @default.
- W3036974278 creator A5082926691 @default.
- W3036974278 date "1994-01-01" @default.
- W3036974278 modified "2023-09-26" @default.
- W3036974278 title "Alignment mark materials for projection electron lithography" @default.
- W3036974278 cites W2020594686 @default.
- W3036974278 cites W2042536071 @default.
- W3036974278 cites W2079058546 @default.
- W3036974278 cites W2101434662 @default.
- W3036974278 cites W4243656136 @default.
- W3036974278 doi "https://doi.org/10.1017/s0424820100171298" @default.
- W3036974278 hasPublicationYear "1994" @default.
- W3036974278 type Work @default.
- W3036974278 sameAs 3036974278 @default.
- W3036974278 citedByCount "0" @default.
- W3036974278 crossrefType "journal-article" @default.
- W3036974278 hasAuthorship W3036974278A5011404203 @default.
- W3036974278 hasAuthorship W3036974278A5024734211 @default.
- W3036974278 hasAuthorship W3036974278A5035173830 @default.
- W3036974278 hasAuthorship W3036974278A5042804916 @default.
- W3036974278 hasAuthorship W3036974278A5065814687 @default.
- W3036974278 hasAuthorship W3036974278A5066994126 @default.
- W3036974278 hasAuthorship W3036974278A5078230417 @default.
- W3036974278 hasAuthorship W3036974278A5082926691 @default.
- W3036974278 hasConcept C105487726 @default.
- W3036974278 hasConcept C11413529 @default.
- W3036974278 hasConcept C120665830 @default.
- W3036974278 hasConcept C121332964 @default.
- W3036974278 hasConcept C147120987 @default.
- W3036974278 hasConcept C160671074 @default.
- W3036974278 hasConcept C171250308 @default.
- W3036974278 hasConcept C192562407 @default.
- W3036974278 hasConcept C200274948 @default.
- W3036974278 hasConcept C204223013 @default.
- W3036974278 hasConcept C2779227376 @default.
- W3036974278 hasConcept C41008148 @default.
- W3036974278 hasConcept C41794268 @default.
- W3036974278 hasConcept C49040817 @default.
- W3036974278 hasConcept C53524968 @default.
- W3036974278 hasConcept C57493831 @default.
- W3036974278 hasConcept C62520636 @default.
- W3036974278 hasConcept C70520399 @default.
- W3036974278 hasConceptScore W3036974278C105487726 @default.
- W3036974278 hasConceptScore W3036974278C11413529 @default.
- W3036974278 hasConceptScore W3036974278C120665830 @default.
- W3036974278 hasConceptScore W3036974278C121332964 @default.
- W3036974278 hasConceptScore W3036974278C147120987 @default.
- W3036974278 hasConceptScore W3036974278C160671074 @default.
- W3036974278 hasConceptScore W3036974278C171250308 @default.
- W3036974278 hasConceptScore W3036974278C192562407 @default.
- W3036974278 hasConceptScore W3036974278C200274948 @default.
- W3036974278 hasConceptScore W3036974278C204223013 @default.
- W3036974278 hasConceptScore W3036974278C2779227376 @default.
- W3036974278 hasConceptScore W3036974278C41008148 @default.
- W3036974278 hasConceptScore W3036974278C41794268 @default.
- W3036974278 hasConceptScore W3036974278C49040817 @default.
- W3036974278 hasConceptScore W3036974278C53524968 @default.
- W3036974278 hasConceptScore W3036974278C57493831 @default.
- W3036974278 hasConceptScore W3036974278C62520636 @default.
- W3036974278 hasConceptScore W3036974278C70520399 @default.
- W3036974278 hasLocation W30369742781 @default.
- W3036974278 hasOpenAccess W3036974278 @default.
- W3036974278 hasPrimaryLocation W30369742781 @default.
- W3036974278 hasRelatedWork W1968289716 @default.
- W3036974278 hasRelatedWork W1988809681 @default.
- W3036974278 hasRelatedWork W2007100303 @default.
- W3036974278 hasRelatedWork W2022121633 @default.
- W3036974278 hasRelatedWork W2043551575 @default.
- W3036974278 hasRelatedWork W2061718516 @default.
- W3036974278 hasRelatedWork W2103536379 @default.
- W3036974278 hasRelatedWork W2119359690 @default.
- W3036974278 hasRelatedWork W2122710251 @default.
- W3036974278 hasRelatedWork W2145411830 @default.
- W3036974278 hasVolume "52" @default.
- W3036974278 isParatext "false" @default.
- W3036974278 isRetracted "false" @default.
- W3036974278 magId "3036974278" @default.
- W3036974278 workType "article" @default.