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• W3038049209 endingPage "108143" @default.
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• W3038049209 abstract "• Time stability of eight QMSs was investigated over 2-years period. • Stability of sensitivity of Faraday cup detector and SEM gain for He and N 2 . • Stability of peak position and peak width of He and N 2 . • Stability of minimum detectable partial pressure for He. • Measurements were carried out according to ISO TS 20175:2018. This study focuses on the time stability of different metrological characteristics of quadrupole mass spectrometers (QMSs). Investigated parameters were the sensitivity, when using a Faraday cup as a detector, the peak position, the peak width, the gain of a secondary electron multiplier, and the minimum detectable partial pressure. Eight different commercial QMSs were investigated at seven national metrology institutes under three different nominal calibration pressures of 5 × 10 −6 Pa, 5 × 10 −5 Pa, and 5 × 10 −4 Pa for N 2 and He. The measurements were carried out using a periodicity of approximately 3 months for a total duration of 2 years. Sensitivity calibrations were conducted either through a comparison method using calibrated ionization gauges or by applying a primary vacuum calibration system. In the case of ionization gauges, they were periodically recalibrated to ensure their stability and traceability to a primary pressure standard." @default.
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• W3038049209 date "2020-12-01" @default.
• W3038049209 modified "2023-09-26" @default.
• W3038049209 title "Time stability characterization of quadrupole mass spectrometers" @default.
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• W3038049209 doi "https://doi.org/10.1016/j.measurement.2020.108143" @default.
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