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- W3039087599 abstract "This article describes methods for solving problems related to the problem of preparing channel surfaces for forming light guides on an LTCC-ceramic substrate. Technological operations of plasma chemical treatment for complex preparation of channel surfaces with optical requirements are considered. A formalized structural and functional model of the technological system and a mathematical model of the process of cleaning the surface of channels from contamination are constructed." @default.
- W3039087599 created "2020-07-10" @default.
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- W3039087599 date "2020-06-01" @default.
- W3039087599 modified "2023-09-27" @default.
- W3039087599 title "Technologies for Surface Preparation of OpticalElectronic Components Substrates" @default.
- W3039087599 cites W2327866928 @default.
- W3039087599 doi "https://doi.org/10.1109/weconf48837.2020.9131152" @default.
- W3039087599 hasPublicationYear "2020" @default.
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