Matches in SemOpenAlex for { <https://semopenalex.org/work/W3039334009> ?p ?o ?g. }
- W3039334009 endingPage "083028" @default.
- W3039334009 startingPage "083028" @default.
- W3039334009 abstract "Abstract We introduce a focussed ion beam (FIB) based ion implanter equipped with an electron beam ion source (EBIS), able to produce highly charged ions. As an example of its utilisation, we demonstrate the direct writing of nitrogen-vacancy centres in diamond using focussed, mask-less irradiation with Ar 8+ ions with sub-micron three dimensional placement accuracy. The ion optical system was optimised and is characterised via secondary electron imaging. The smallest measured foci are below 200 nm, using objective aperture diameters of 5 and 10 µ m, showing that nanoscale ion implantation using an EBIS is feasible." @default.
- W3039334009 created "2020-07-10" @default.
- W3039334009 creator A5017106564 @default.
- W3039334009 creator A5025295677 @default.
- W3039334009 creator A5033528054 @default.
- W3039334009 creator A5046763218 @default.
- W3039334009 creator A5048951871 @default.
- W3039334009 date "2020-08-01" @default.
- W3039334009 modified "2023-10-03" @default.
- W3039334009 title "Nanoscale ion implantation using focussed highly charged ions" @default.
- W3039334009 cites W1509182036 @default.
- W3039334009 cites W1576302787 @default.
- W3039334009 cites W1976953445 @default.
- W3039334009 cites W1977201864 @default.
- W3039334009 cites W2007097657 @default.
- W3039334009 cites W2029912647 @default.
- W3039334009 cites W2030568927 @default.
- W3039334009 cites W2067986864 @default.
- W3039334009 cites W2069055636 @default.
- W3039334009 cites W2071994931 @default.
- W3039334009 cites W2110206643 @default.
- W3039334009 cites W2149048031 @default.
- W3039334009 cites W2158605123 @default.
- W3039334009 cites W2175394847 @default.
- W3039334009 cites W2485405796 @default.
- W3039334009 cites W2808883116 @default.
- W3039334009 cites W2941985209 @default.
- W3039334009 cites W2982593990 @default.
- W3039334009 cites W3103869002 @default.
- W3039334009 cites W4240956926 @default.
- W3039334009 doi "https://doi.org/10.1088/1367-2630/aba0e6" @default.
- W3039334009 hasPublicationYear "2020" @default.
- W3039334009 type Work @default.
- W3039334009 sameAs 3039334009 @default.
- W3039334009 citedByCount "8" @default.
- W3039334009 countsByYear W30393340092021 @default.
- W3039334009 countsByYear W30393340092022 @default.
- W3039334009 countsByYear W30393340092023 @default.
- W3039334009 crossrefType "journal-article" @default.
- W3039334009 hasAuthorship W3039334009A5017106564 @default.
- W3039334009 hasAuthorship W3039334009A5025295677 @default.
- W3039334009 hasAuthorship W3039334009A5033528054 @default.
- W3039334009 hasAuthorship W3039334009A5046763218 @default.
- W3039334009 hasAuthorship W3039334009A5048951871 @default.
- W3039334009 hasBestOaLocation W30393340091 @default.
- W3039334009 hasConcept C107920040 @default.
- W3039334009 hasConcept C111337013 @default.
- W3039334009 hasConcept C114221277 @default.
- W3039334009 hasConcept C120665830 @default.
- W3039334009 hasConcept C121332964 @default.
- W3039334009 hasConcept C145148216 @default.
- W3039334009 hasConcept C159985019 @default.
- W3039334009 hasConcept C161866238 @default.
- W3039334009 hasConcept C184779094 @default.
- W3039334009 hasConcept C185544564 @default.
- W3039334009 hasConcept C188224857 @default.
- W3039334009 hasConcept C192562407 @default.
- W3039334009 hasConcept C24890656 @default.
- W3039334009 hasConcept C2776921476 @default.
- W3039334009 hasConcept C41823505 @default.
- W3039334009 hasConcept C45206210 @default.
- W3039334009 hasConcept C46141821 @default.
- W3039334009 hasConcept C49040817 @default.
- W3039334009 hasConcept C50774322 @default.
- W3039334009 hasConcept C62520636 @default.
- W3039334009 hasConcept C78336883 @default.
- W3039334009 hasConcept C93106096 @default.
- W3039334009 hasConceptScore W3039334009C107920040 @default.
- W3039334009 hasConceptScore W3039334009C111337013 @default.
- W3039334009 hasConceptScore W3039334009C114221277 @default.
- W3039334009 hasConceptScore W3039334009C120665830 @default.
- W3039334009 hasConceptScore W3039334009C121332964 @default.
- W3039334009 hasConceptScore W3039334009C145148216 @default.
- W3039334009 hasConceptScore W3039334009C159985019 @default.
- W3039334009 hasConceptScore W3039334009C161866238 @default.
- W3039334009 hasConceptScore W3039334009C184779094 @default.
- W3039334009 hasConceptScore W3039334009C185544564 @default.
- W3039334009 hasConceptScore W3039334009C188224857 @default.
- W3039334009 hasConceptScore W3039334009C192562407 @default.
- W3039334009 hasConceptScore W3039334009C24890656 @default.
- W3039334009 hasConceptScore W3039334009C2776921476 @default.
- W3039334009 hasConceptScore W3039334009C41823505 @default.
- W3039334009 hasConceptScore W3039334009C45206210 @default.
- W3039334009 hasConceptScore W3039334009C46141821 @default.
- W3039334009 hasConceptScore W3039334009C49040817 @default.
- W3039334009 hasConceptScore W3039334009C50774322 @default.
- W3039334009 hasConceptScore W3039334009C62520636 @default.
- W3039334009 hasConceptScore W3039334009C78336883 @default.
- W3039334009 hasConceptScore W3039334009C93106096 @default.
- W3039334009 hasFunder F4320320300 @default.
- W3039334009 hasFunder F4320320879 @default.
- W3039334009 hasFunder F4320321114 @default.
- W3039334009 hasFunder F4320323752 @default.
- W3039334009 hasFunder F4320334763 @default.
- W3039334009 hasIssue "8" @default.
- W3039334009 hasLocation W30393340091 @default.
- W3039334009 hasOpenAccess W3039334009 @default.
- W3039334009 hasPrimaryLocation W30393340091 @default.