Matches in SemOpenAlex for { <https://semopenalex.org/work/W3039665172> ?p ?o ?g. }
- W3039665172 endingPage "647" @default.
- W3039665172 startingPage "647" @default.
- W3039665172 abstract "Epitaxial (100) TiC film deposition on Si (100) substrate by direct current magnetron reactive sputtering of a metallic Ti target with 3%–6% CH4 in Ar gas was investigated. X-ray diffraction and cross-sectional scanning transmission electron microscopy (STEM) reveal that epitaxial cubic TiC can be grown on the Si substrate by domain matching epitaxy in 5/4 ratio with the epitaxial relationship of TiC (100)[0 1 ¯ 1] // Si (100)[0 1 ¯ 1]. For sputtering with 3% and 4% CH4, the deposited films are found to consist of both TiC and metallic Ti phases. Increasing the CH4 flow ratio to 5% results in a deposited film completely consisting of TiC without metallic Ti phase. The crystallinity of the deposited TiC is also improved with increasing the CH4 ratio to 5%. X-ray photoelectron spectroscopy shows that the [C]/[Ti] atomic ratio in TiC is nearly close to 1 for growth with 5% CH4 flow ratio and above. The measured electrical resistivities of the deposited films also increase from 41 to 153 μΩ·cm with increasing the CH4 ratio from 3% to 6%. With film growth beyond 50 nm thickness, it is shown that some disoriented TiC grains are formed." @default.
- W3039665172 created "2020-07-10" @default.
- W3039665172 creator A5017123496 @default.
- W3039665172 creator A5034629726 @default.
- W3039665172 creator A5062144529 @default.
- W3039665172 creator A5065369099 @default.
- W3039665172 creator A5086648785 @default.
- W3039665172 date "2020-07-05" @default.
- W3039665172 modified "2023-10-15" @default.
- W3039665172 title "Reactive Sputtering Deposition of Epitaxial TiC Film on Si (100) Substrate" @default.
- W3039665172 cites W1577365476 @default.
- W3039665172 cites W1965203572 @default.
- W3039665172 cites W1968032279 @default.
- W3039665172 cites W1970921052 @default.
- W3039665172 cites W1977933618 @default.
- W3039665172 cites W1980504091 @default.
- W3039665172 cites W1981966175 @default.
- W3039665172 cites W1988274717 @default.
- W3039665172 cites W1988666159 @default.
- W3039665172 cites W1988952264 @default.
- W3039665172 cites W1989554193 @default.
- W3039665172 cites W2005164468 @default.
- W3039665172 cites W2014511339 @default.
- W3039665172 cites W2017112740 @default.
- W3039665172 cites W2017887224 @default.
- W3039665172 cites W2019643648 @default.
- W3039665172 cites W2020736865 @default.
- W3039665172 cites W2024412393 @default.
- W3039665172 cites W2026869555 @default.
- W3039665172 cites W2026940027 @default.
- W3039665172 cites W2028843617 @default.
- W3039665172 cites W2029788549 @default.
- W3039665172 cites W2032044802 @default.
- W3039665172 cites W2032861393 @default.
- W3039665172 cites W2033706663 @default.
- W3039665172 cites W2041914509 @default.
- W3039665172 cites W2042773086 @default.
- W3039665172 cites W2045180865 @default.
- W3039665172 cites W2062208974 @default.
- W3039665172 cites W2064545440 @default.
- W3039665172 cites W2065846489 @default.
- W3039665172 cites W2066960442 @default.
- W3039665172 cites W2071142872 @default.
- W3039665172 cites W2076205323 @default.
- W3039665172 cites W2080059773 @default.
- W3039665172 cites W2080981645 @default.
- W3039665172 cites W2081851029 @default.
- W3039665172 cites W2083922083 @default.
- W3039665172 cites W2087011607 @default.
- W3039665172 cites W2087767855 @default.
- W3039665172 cites W2088013229 @default.
- W3039665172 cites W2088115901 @default.
- W3039665172 cites W2101995690 @default.
- W3039665172 cites W2145447555 @default.
- W3039665172 cites W2157672418 @default.
- W3039665172 cites W2163829832 @default.
- W3039665172 cites W2207639985 @default.
- W3039665172 cites W2312646291 @default.
- W3039665172 cites W2467246819 @default.
- W3039665172 cites W2954250502 @default.
- W3039665172 cites W4235574122 @default.
- W3039665172 doi "https://doi.org/10.3390/coatings10070647" @default.
- W3039665172 hasPublicationYear "2020" @default.
- W3039665172 type Work @default.
- W3039665172 sameAs 3039665172 @default.
- W3039665172 citedByCount "6" @default.
- W3039665172 countsByYear W30396651722022 @default.
- W3039665172 countsByYear W30396651722023 @default.
- W3039665172 crossrefType "journal-article" @default.
- W3039665172 hasAuthorship W3039665172A5017123496 @default.
- W3039665172 hasAuthorship W3039665172A5034629726 @default.
- W3039665172 hasAuthorship W3039665172A5062144529 @default.
- W3039665172 hasAuthorship W3039665172A5065369099 @default.
- W3039665172 hasAuthorship W3039665172A5086648785 @default.
- W3039665172 hasBestOaLocation W30396651721 @default.
- W3039665172 hasConcept C110738630 @default.
- W3039665172 hasConcept C111368507 @default.
- W3039665172 hasConcept C113196181 @default.
- W3039665172 hasConcept C127313418 @default.
- W3039665172 hasConcept C127413603 @default.
- W3039665172 hasConcept C146088050 @default.
- W3039665172 hasConcept C159985019 @default.
- W3039665172 hasConcept C171250308 @default.
- W3039665172 hasConcept C175708663 @default.
- W3039665172 hasConcept C185592680 @default.
- W3039665172 hasConcept C19067145 @default.
- W3039665172 hasConcept C192562407 @default.
- W3039665172 hasConcept C22423302 @default.
- W3039665172 hasConcept C26771246 @default.
- W3039665172 hasConcept C2777289219 @default.
- W3039665172 hasConcept C2779227376 @default.
- W3039665172 hasConcept C42360764 @default.
- W3039665172 hasConcept C43617362 @default.
- W3039665172 hasConcept C46275449 @default.
- W3039665172 hasConcept C61427134 @default.
- W3039665172 hasConceptScore W3039665172C110738630 @default.
- W3039665172 hasConceptScore W3039665172C111368507 @default.
- W3039665172 hasConceptScore W3039665172C113196181 @default.