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- W3040093034 abstract "Metal oxide films are are an emerging sensing technology for the identification of gas phase species. Metalorganic chemical vapor deposition (MOCVD) on microhotplate structures provides a method of fabricating gas sensing layers in self-patterned structures. Investigation of the morphological characteristics of film growth is normally not possible inside a MOCVD reactor, especially the nucleation phase and subsequent deposition of a continuous film. The environmental scanning electron microscope (ESEM) operates at a pressure range of 133-666 Pa (1-5 Torr) which is similar to the growth condition normally used for oxide film MOCVD on microhotplates. Our results show that microhotplate MOCVD can be monitored in situ by secondary electron and backscattered electron imaging in the ESEM. The microhotplate chemical sensor devices employed in this work are mounted in conventional 40 pin packages which provide separate electrical connections to each of the four micromachined heater and contact structures." @default.
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- W3040093034 date "1997-08-01" @default.
- W3040093034 modified "2023-09-25" @default.
- W3040093034 title "Microhotplate Chemical Vapor Deposition and in the Environmental SEM Chamber" @default.
- W3040093034 cites W1981082036 @default.
- W3040093034 doi "https://doi.org/10.1017/s1431927600009909" @default.
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